CIF格式挖空多边形切割为PG3600格式矩形的算法  

The Algorithm for Transforming Center-hollowed Polygon in CIF Format into Rectangles in PG3600 Format

作　　者：李金儒[1] 陈宝钦[1] 汤跃科[1] 薛丽君[1] 

机构地区：[1]中国科学院微电子研究所纳米加工与新器件集成实验室,北京100029

出　　处：《微细加工技术》2006年第2期5-7,20,共4页Microfabrication Technology

基　　金：国家重点基础研究项目资助(G2000036504;2002CB311907;2002AA325040);国家自然科学基金资助项目(60290081;60276019;90207004;60376020;60236010)

摘　　要：给出了一种微光刻图形CIF格式的中间挖空多边形切割成PG3600格式所需矩形的新算法。首先,用水平扫描线把有内环的多边形切割成三角形或梯形;然后,把三角形或梯形切割成矩形和直角三角形;最后,把直角三角形用矩形包围或将其直接切割成矩形。本算法的优越性在于不需要先把挖空多边形切割成凸多边形后再进行切割,而是直接进行,对于三角形则采用了矩形包围拼接的方法,大大减少了切割出的矩形数据量。另外,本算法同样适用于没有内环的凸凹多边形的切割。A new algorithm which is used to transform center-hollowed polygons of CIF format in microlithography pattern into rectangles of PG3600 format is presented.Firstly,polygons with inner loops are divided into triangles or trapeziums by horizontal scanning beam.Furthermore,triangles or trapeziums are divided into rectangles and right-angled triangles.Finally,right-angled triangles are enveloped by rectangles or directly divided into rectangles.The advantage of the algorithm is that it doesn't divide center-hollowed polygons into convex polygons,it makes direct divisions for polygons.Hence,the algorithm remarkably reduces the total data of the rectangles divided.Meanwhile,the algorithm can also be used for the division of polygons without inner loops.

关 键 词：微光刻图形 数据格式转换 挖空多边形 图形切割 

分 类 号：TN305.7[电子电信—物理电子学] TP301.6[自动化与计算机技术—计算机系统结构]