图形发生器的成像系统  

Imaging System of Pattern Generator

作　　者：刘伟[1] 魏淑华[2] 方光荣[2] 顾文琪[2] 

机构地区：[1]山东理工大学电气与电子工程学院,山东淄博255049 [2]中国科学院电工研究所,北京100080

出　　处：《微细加工技术》2006年第3期6-9,共4页Microfabrication Technology

基　　金：中国科学院知识创新工程重大项目资助(KGCX1-Y-8)

摘　　要：为实现电子束曝光机扫描场的线性畸变校正,设计了图形发生器的成像系统,该系统包括硬件和软件两部分。硬件设计上使用了高速、高精度模数转换器,并对其工作方式及图像采集流程做了具体阐述。软件设计上利用点阵成像的原理,把采集到的图像信号转变成相应的灰度值,并按点阵排列,将最终获得的图像显示在计算机屏幕上,以实现校正。同时还给出了对图像进行局部放大的方法及计算公式。实验证明,该成像系统工作正常,可以获得清晰的图像。An imaging system of pattern generator was designed to correct linear distortion of scanning field of an e-beam lithography system, which was composed of both hardware and software. A high speed and high precision analog-to-digital convertor was employed. The working procedures and the software processes of the imaging system were described. The imaging principle of lattice was applied to convert the collected signals of image into corresponding gray values and they were arranged according to lattice to form the image which was finally displayed on the screen of computer and realize the correction. Simultaneously, the method of local image zoom and the corresponding calculation functions were given. The experimental results indicate that the imaging system can well work and a clear image can be obtained.

关 键 词：图形发生器 扫描 点阵成像原理 

分 类 号：TN305.7[电子电信—物理电子学]