硅微喷阵列芯片的设计、制作与应用研究  

Design,Fabrication and Application of Silicon Based Micro Dispensing Array Chip

作　　者：许宝建[1] 乔治[1] 金庆辉[1] 赵建龙[1] 

机构地区：[1]中国科学院上海微系统与信息技术研究所生物芯片实验室

出　　处：《微细加工技术》2006年第4期48-52,共5页Microfabrication Technology

基　　金：中国科学院知识创新工程重要方向资助项目(KGCX2-SW-108)

摘　　要：介绍了一种用于制作生物微阵列的新型微喷阵列芯片。基于半导体光刻技术和干法刻蚀技术,成功制作了喷孔外侧含有间隙环的硅微喷阵列芯片,解决了溶液进样难、微阵列样品点缺失、样品点漂移以及液体回流等问题。在5 kPa气压驱动下,该芯片中的样品能在3.4 mm×3.4 mm的玻璃片上制成5×5样品微阵列,25个点的直径平均值为356μm,直径的变异系数(25个点直径的标准偏差与算术平均值的比值)为2.8%。计算流体力学模拟结果和实验结果均表明,该微喷阵列芯片能快速、稳定地制作出样品点大小均一的微阵列,进一步推动了微阵列芯片的应用和发展。A micro dispensing array chip used for biological assay was reported. The silicon-based micro dispensing chip with annular interspaces around the corresponding nozzles was successfully fabricated using photolithograph and deep reactive ion etching (DRIE) techniques. It can be used to resolve some problems, such as the difficulty of filling-in liquid, spot lack, spot shift, fluid reflow, etc.. Up to 25 individual fluid spots with a average diameter of 356 μm distributed in a 5 × 5 array can be simultaneously produced by the chip on a glass surface with a area of 3.4 mm × 3.4 mm at 5 kPa, and the diameter variation coefficient (the ratio of the standard deviation of the diameters of 25 spots to their average value) is 2.8%. The results of both computational fluid dynamics (CFD) simulations and experiments show that the silicon chip can produce uniform microarrays with high stability and good reproducibility in a short time, and the chip can greatly promote the applications and developments of microarray assay.

关 键 词：微喷阵列芯片 微阵列 深反应离子刻蚀 计算流体力学模拟 

分 类 号：TN305[电子电信—物理电子学]