基于相位测量法测量透射式相位光栅的表面形貌  

Measurement of surface topography of transmission phase grating based on phase measure method

作　　者：桂敏[1] 匡登峰[1] 方志良[1] 

机构地区：[1]南开大学现代光学研究所光电信息技术科学教育部重点实验室,天津300071

出　　处：《光电子．激光》2009年第10期1337-1341,共5页Journal of Optoelectronics·Laser

摘　　要：建立了一套基于马赫-曾德尔干涉仪的测量系统,获得了透射式相位光栅的相位信息并推算出光栅的表面形貌。给出了相位测量法的基本原理,运用傅里叶变换法和相位解包裹技术,对实验系统采集的干涉图的相位信息进行处理并计算出光栅的高度、周期和底角等结构参数。结果表明,该测量方法和系统能够精确地测量光学相位元件的表面形貌,具有较高的实用价值。A measurement system based on M-Z interferometer is set up to obtain the phase information and characterize the surface topography of the grating.By using Fourier transform method and phase unwrapping technique,the interferogram obtained by the measurement system is processed and then the structure parameters of the grating such as height,period and angle are calculated.The result shows that this measurement method and system can measure the surface topography of optical phase element accurately,and has pra...

关 键 词：位相光栅 位相测量 傅里叶变换 位相解包裹 

分 类 号：TP274[自动化与计算机技术—检测技术与自动化装置]