2μm激光探测器的设计和制备  

Design and fabrication of 2 μm laser detecter

作　　者：石柱[1] 王鸥[1] 

机构地区：[1]西南技术物理研究所,成都610041

出　　处：《红外与激光工程》2006年第z5期37-42,共6页Infrared and Laser Engineering

摘　　要：通过分析2μm波长的差分吸收雷达(DIAL)用于测量大气气象参数和 CO_2分布等测量对激光探测器的技术要求,介绍了相应的2μm波长光电二极管探测器的技术指标。根据该指标进行了器件的材料、材料结构和器件结构设计。其外延材料采用了 In_(1-x)Ga_xAs_yP_(1-y)系列结构。为了减小暗电流和噪声,器件结构借用InGaAs 雪崩管的分离吸收区和倍增区结构,把 PN 结放在具有宽带隙的 InAs_(1-y)P_y 中,光吸收在窄带隙的In_(1-x)Ga_xAs 中。最后,简略介绍了该器件的制备工艺和技术。Based on the analyzing of the requirement on 2 μm wavelength laser detectors used in Differential Absorption Lidar(DIAL),which is expected to measure troposphere parameters and CO_2 profiles,this paper introduced the necessary properties of a 2 μm wavelength photodiode detector.According to the properties,we design the fraction,the structure of epilayers,and the detector structure.In_(1-x)Ga_xAs_yP_(1-y) epilayers were selected.For decreasing dark current and noise,the structure of separated absorption layer and avalanche layer,which is employed in avalanche photo diode,was introduced into this device.The p-n joint is put into a wide gap InAs_(1-y)P_y layer,and the absorption layer is in a narrow gap In_(1-x)Ga_xAs layer.In the end,the fabrication processions and technologies are concisely described.

关 键 词：2μm 激光 探测器 设计 制备 

分 类 号：TN215[电子电信—物理电子学]