三坐标测量机X向位置偏差的测量不确定度  

Uncertainty in Measurement of Positional Deviation of Coordinate Measuring Machine's X-Direction

作　　者：方欣欣[1] 王子刚[1] 

机构地区：[1]内蒙古工业大学信息学院,呼和浩特010062

出　　处：《仪器仪表学报》2002年第z3期171-173,共3页Chinese Journal of Scientific Instrument

基　　金：内蒙古自然科学基金 ( 2 0 0 0 130 2 )资助项目

摘　　要：提出了对三坐标测量机 X向位置偏差δx(x)测量不确定度评定的一种模式 ,测量仪器采用了双频激光干涉仪。在数学模型的建立过程中充分考虑了δx(x)的溯源性 ,数学模型主要反映了三坐标测量机 X向温度偏离 2 0℃对测量值的影响。在不确定度传播律中较好的解决了各不确定度来源项对合成标准不确定度的贡献途径问题。在结论中讨论了 u(δxx)的量值传递问题并提出了减小 u(δxx)的对策。The author introduces a model that can express uncertainty in measurement of X-direction's positional deviation of coordinate measuring machines (CMM) under qusi-rigid body model. The instrument in this measurement is a laser interferometer. The mathematic model built in this measurement shows how the departure of temperature of CMM'X-direction from 20℃ influences the measuring value.In the law of propagation of uncertainty, the way of how the sources of uncertainty contribute to combined uncertainty has been determined. In the conclusion, the issue of quantity transmission of u(δ xx )is discussed and the method to reduce the uncertainty of positional deviation is given.

关 键 词：三坐标测量机 位置偏差 双频激光干涉仪 测量不确定度 

分 类 号：TP2[自动化与计算机技术—检测技术与自动化装置]