基于聚酰亚胺的温湿压集成传感器  

Integrated Sensor of Temperature Humidity and Pressure Based on Polyimide

作　　者：武宇[1] 赵湛[1] 方震[1] 张博军[1] 

机构地区：[1]中国科学院电子学研究所传感技术国家重点实验室

出　　处：《仪器仪表学报》2004年第z3期101-103,共3页Chinese Journal of Scientific Instrument

基　　金：中国科学院微系统创新项目资助。

摘　　要：微型化、集成化可以使得传感系统减少体积、重量,降低成本,提高系统的可靠性,具有重要的科学意义。基于聚酰亚胺材料,利用MEMS技术,设计了一个用于测量大气湿度、温度和气压检测的微型集成传感器。分别采用湿敏电容、铂电阻法和聚酰亚胺薄膜对湿度、温度、压力进行检测,并且进行了理论计算,设计了加工工艺步骤,制作出雏形器件。Integrated sensor has the advantages of small size, low cost and high reliability. Based on polymide, a design of integrated sensors for measuring humidity, temperature and pressure was described Capacitive sensors were used to measure humidity and pressure. Pt resistance was used to measure temperature. The characteristics of the sensor have been calculated and simulated. The design and fabrication processing was introduced.

关 键 词：集成传感器 MEMS 聚酰亚胺 湿 度 气 压 

分 类 号：TH7-55[机械工程—仪器科学与技术]