MEMS方法制造小型PEM燃料电池电极  

Electrode of Smart PEM Fuel Cell Fabricated by MEMS

作　　者：张太平[1] 阎桂珍[1] 张大成[1] 阮勇[1] 陈正豪[2] 邢怡铭[3] 

机构地区：[1]北京大学微电子所,北京100871 [2]香港科技大学电气电子工程系 [3]香港科技大学化工系

出　　处：《仪器仪表学报》2004年第z3期126-128,154,共4页Chinese Journal of Scientific Instrument

基　　金：国家重大基础研究项目"973"(课题编号G1999033108)。

摘　　要：小型PEM燃料电池电极有着比较复杂的细微结构,电极担负了收集电荷,传输燃料,催化剂载体和构架支撑的功能。介绍了一种新的带有燃料传输孔的硅片电极制造方法,并且在它的表面上生长了一层多孔硅薄膜,以利于燃料传输,扩散和渗透。多孔硅孔径分布和深度范围从百纳米到几十纳米。当催化剂Pt溅射到它表面时,受多孔硅形状的限制,Pt就形成了不连续微小颗粒,对乙醇有比较强的催化作用。用此电极组装的电池,使用乙醇或甲醇燃料时分别有0 .5 5 V和0 .6 V的输出电压。The electrode of micro fuel cell is an important element.It describes a novel approach of fabrication of micro fuel cell electrode.The electrode has three function:collect current,catalyst loader;transport fuel. A new method to produce density holes and using plasma to etch poly-silicon becoming porous on the interface is developed. The ora side of the hole is 60×60 um2.The porous silicon (PS) is hundreds nm.The liquid fuel (methanol or alcohol) can be flowed into the interface among catalyst and PS and proton-conducting membrane without any bump and heater to drive.Platinum was sputtering as small grain on the porous surface.It has a stronger catalysis.The electrodes with this kind of structure are used in a micro fuel cell and are measured.

关 键 词：燃料电池 多孔硅 等离子 

分 类 号：TH7-55[机械工程—仪器科学与技术]