磁控溅射法制备Ag/FePt/C/FePt薄膜的结构和磁性能  

Structure and magnetic properties of Ag/FePt/C/FePt thin films prepared by magnetron sputtering

作　　者：王永红[1] 刘梅[1] 张玉梅[1] 陈芳慧[1] 李海波[1] 

机构地区：[1]吉林师范大学凝聚态物理与材料科学研究所,吉林四平136000

出　　处：《电子元件与材料》2010年第8期48-50,共3页Electronic Components And Materials

基　　金：国家自然科学基金资助项目(No2091055);教育部科技研究重点项目(No208178)

摘　　要：采用磁控溅射法,在自然氧化的Si(001)基片上沉积了Ag/FePt/C/FePt纳米薄膜,并分别在400,450,500,600℃下对薄膜样品进行了1h的退火热处理。利用X射线衍射仪和振动样品磁强计,对薄膜样品的结构和磁性进行了分析。结果表明,当热处理温度为450℃时,Ag/FePt/C/FePt薄膜中已形成了具有有序面心四方结构的L10-FePt。随着热处理温度的升高,薄膜样品的有序化程度提高,矫顽力Hc增强,晶粒尺寸变大。当热处理温度为600℃时,薄膜样品的平行膜面Hc为905.8kA·m-1,晶粒尺寸为23nm。Ag/FePt/C/FePt thin films were deposited on the self-oxidized Si(001) substrate by the magnetron sputtering method,and then they were annealed in vacuum for 1 h at 400,450,500 and 600 ℃,respectively.The structure and magnetic properties of the prepared thin films were investigated with the X-ray diffraction(XRD) and vibrating sample magnetometer(VSM).The results show that,when the annealing temperature is 450 ℃,L10-FePt with ordered face centered tetragonal structure appears in the Ag/FePt/C/FePt thin film....

关 键 词：磁控溅射法 FEPT 结构 磁性能 

分 类 号：O484.43[理学—固体物理]