磁控溅射CrNx薄膜的接触电阻及其耐腐蚀性能  

The Contact Resistance and Corrosion Resistance of CrNx Film Deposited by Magnetron Sputtering

作　　者：谭俊[1] 邢汝鑫[2] 钱耀川[2] 

机构地区：[1]装甲兵工程学院再制造技术重点实验室,北京100072 [2]装甲兵工程学院全军装备表面工程重点实验室,北京100072

出　　处：《中国表面工程》2010年第6期30-33,39,共5页China Surface Engineering

基　　金：重点实验室基金项目(9140C8502021003)

摘　　要：采用磁控溅射工艺,在304不锈钢表面沉积CrNx薄膜。采用扫描电子显微镜(SEM)和场发射扫描电子显微镜(FESEM)观察薄膜形貌,采用能谱仪(EDS)和X射线光电子能谱(XPS)分析薄膜的元素组成和化学价态;测试了其接触电阻及耐腐蚀性能。结果表明:薄膜以柱状晶方式生长,主要由Cr2N和Cr组成;在质子交换膜燃料电池电堆的组装力范围内接触电阻降低明显;在模拟电池环境腐蚀溶液中腐蚀电流降低明显,耐腐蚀性能显著增强。The chromium nitride film was prepared on 304 stainless steel by magnetron sputtering.The morphology and corrosive surface of the film was detected by scanning electron microscopy(SEM) and field emission scanning electron microscopy(FESEM).The chemical analysis was carried out by X–ray photoelectron spectroscopy(XPS) and energy dispersive spectrometer(EDS).The contact resistance and corrosion resistance of the coatings were tested.The result shows that the film is composited of Cr and Cr2N,which growth as c...

关 键 词：燃料电池 金属双极板 磁控溅射 CrNx 

分 类 号：TM911.4[电气工程—电力电子与电力传动]