动圈式磁悬浮工件台线圈阵列实时电流分配法则  

Coil Array Real-time Commutation Law for Magnetically Levitated Stage with Moving-coils

作　　者：张生果[1] 朱煜[1] 尹文生[1] 杨开明[1] 张鸣[1] 

机构地区：[1]清华大学精密仪器与机械学系,北京100084

出　　处：《机械工程学报》2011年第6期180-185,共6页Journal of Mechanical Engineering

基　　金：国家重点基础研究发展计划(973计划;2009CB724205);清华大学摩擦学国家重点实验室自主研究课题(SKLT08B04)资助项目

摘　　要：在多自由度磁悬浮工件台运动控制中,多自由度动力学解耦是至关重要的。解耦多自由度动力学需要将工件台动台所受的力/矩分解到对应的运动自由度上。而由于永磁阵列磁场的准静态特性,力/矩分解只能通过线圈阵列实时电流分配来实现。采用洛伦兹力法则的平面积分,建立多自由度动圈式磁悬浮工件台的力/矩分解模型;基于此力/矩分解模型和线圈阵列热损耗最小原则,建立工件台线圈阵列实时电流分配法则;分析该法则的数值稳定性及其对产生的对应力/矩的误差影响。理论分析和案例研究表明,该法则数值稳定性高,计算准确可靠,根据该法则对线圈阵列分配电流后产生的对应力/矩误差很小。该法则可用于多自由度动圈式磁悬浮工件台力/矩分解、多自由度动力学解耦,从而实现对工件台的运动控制。It is essential to decouple the multi-degrees-of-freedom dynamics for controlling a multi-degrees-of-freedom magnetically levitated stage with moving-coils.Decoupling the multi-degrees-of-freedom dynamics needs to decompose forces and torques acting on translator of the stage to their corresponding degrees-of-freedom.Force/torque decomposing can only be validated by real-time commutating the coil array because of the quasi-static magnetic field of the permanent magnet array.Firstly,the force/torque decomposing model is build by using the planar integration of Lorentz force law.Then,the coil array real-time commutation law of the multi-degrees-of-freedom magnetically levitated stage with moving-coils is established based on the force/torque decomposing model and the principle of minimal coil array heat-loss.Lastly,the numerical stability of the law and its error influence on corresponding force/torque are analyzed.Theoretical analysis and case research indicate that this law is of high numerical stability,it can calculate coil array currents accurately and reliably and the error of force/torque actuated by the law-commutated currents is quite small.This coil array real-time commutation law can be used to commutate the coil array,decompose the forces and torques,so as to control the multi-degrees-of-freedom magnetically levitated stage with moving-coils.

关 键 词：动圈式磁悬浮工件台 力/矩分解 线圈阵列 实时电流分配法则 条件数 数值稳定性 

分 类 号：TH-55[机械工程]