Deposition and properties of highly c-oriented of InN films on sapphire substrates with ECR-plasma-enhanced MOCVD  

作　　者：Qin, Fuwen  Zhang, Dong  Bai, Yizhen  Ju, Zhenhe  Li, Shuangmei  Li, Yucai  Pang, Jiaqi  Bian, Jiming 

机构地区：[1]School of Physics and Optoelectronic Technology,Dalian University of Technology,Dalian 116024,China [2]Key Laboratory of Materials Modification by Laser,Ion and Electron Beams,Ministry of Education,Dalian University of Technology,Dalian 116024,China [3]New Energy Source Research Center,Shenyang Institute of Engineering,Shenyang 110136,China [4]Department of Physics,Shenyang Institute of Engineering,Shenyang 110136,China

出　　处：《Rare Metals》2012年第2期150-153,共4页稀有金属（英文版）

基　　金：supported by the National Natural Science Foundation of China (No. 61040058) (No. 60976006);the Fundamental Research Funds for the Central Universities (No.DUT10LK01);the Science and Technology Foundation for Higher Education of Liaoning Province, China and Science and Technology Innovation Project Foundation for Higher Education School (No.707015)

摘　　要：InN films with highly c-axis preferred orientation were deposited on sapphire substrate by low-temperature electron cyclotron resonance plasma-enhanced metal organic chemical vapor deposition (ECR-PEMOCVD). Trimethyl indium (TMIn) and N 2 were applied as precursors of In and N, respectively. The quality of as-grown InN films were systematically investigated as a function of TMIn fluxes by means of reflection high-energy electron diffraction (RHEED), X-ray diffraction analysis (XRD), and atomic force microscopy (AFM). The results show that the dense and uniform InN films with highly c-axis preferred orientation are successfully achieved on sapphire substrates under optimized TMIn flux of 0.8 ml min 1 . The InN films reported here will provide various opportunities for the development of high efficiency and high-performance semiconductor devices based on InN material.

关 键 词：InN films ECR-PEMOCVD sapphire substrates semiconductor devices 

分 类 号：TB383.2[一般工业技术—材料科学与工程]