辅助气体组成对类金刚石薄膜结构和性能的影响  

Effects of assistant gases composition on the structure, properties of diamond-like carbon films

作　　者：代海洋[1] 陈镇平[1] 程学瑞[1] 翟凤潇[1] 苏玉玲[1] 

机构地区：[1]郑州轻工业学院技术物理系,河南郑州450002

出　　处：《功能材料》2012年第12期1643-1646,1650,共5页Journal of Functional Materials

基　　金：国家自然科学基金资助项目(11175159);郑州轻工业学院博士科研基金资助项目(2010BSJJ030)

摘　　要：分别以氩气-甲烷、氩气-乙炔为辅助气体,高纯石墨为靶材,利用中频脉冲非平衡磁控溅射技术制备了类金刚石薄膜。采用Raman光谱、X射线光电子能谱、纳米压痕测试仪、原子力显微镜对所制备类金刚石薄膜的键结构、机械性能、表面形貌进行了分析。Raman光谱和X射线光电子能谱测试结果表明,以氩气-甲烷为辅助气体制备的类金刚石薄膜中sp3杂化键的含量比以氩气-乙炔为辅助气体制备的类金刚石薄膜的高。纳米压痕测试结果表明,以氩气-甲烷为辅助气体制备的类金刚石薄膜的纳米硬度比以氩气-乙炔为辅助气体的高。原子力显微镜测试结果表明,以氩气-甲烷为辅助气体制备的类金刚石薄膜的RMS表面粗糙度比以氩气-乙炔为辅助气体的低。以上结果说明辅助气体组成对类金刚石薄膜的键结构、机械性能、表面形貌有较大的影响。Diamond-like carbon(DLC) films on glass wafers were produced by middle frequency pulsed unbalanced magnetron sputtering technique(MFPUMST) with methane-argon or acetylene-argon mixed gases as assistant gases.These films were characterized by Raman spectroscopy,X-ray photoelectron spectroscopy(XPS),nanoindentation and atomic force microscopy(AFM).The chemical bonding of carbon characterized by Raman spectroscopy and XPS shows that the sp3 fraction in DLC films obtained with argon-methane mixed gases as assistant gases is higher than those produced by means of argon-acetylene as assistant gases.Nano-hardness for these films analyzed by a nano-indentation technique shows the nano-hardness in DLC films obtained with argon-methane mixed gases as assistant gases is higher than those produced by means of argon-acetylene as assistant gases.AFM tests indicate that RMS roughness of the film obtained with argon-methane mixed gases as assistant gases is lower than those produced by means of argon-acetylene as assistant gases.The results shown above indicate that the assistant gases composition has a strong influence on the bonding configuration,properties,surface morphology of the deposited DLC films.

关 键 词：类金刚石薄膜 辅助气体组成 中频脉冲非平衡磁控溅射技术 结构 性能 

分 类 号：TB383.2[一般工业技术—材料科学与工程]