溶胶凝胶法制备的ZnO气敏薄膜  

ZnO Gas -Sensitive Films Prepared Through Sol -Gel Process

作　　者：潘素瑛[1] 梅森[1] 

机构地区：[1]武汉工业大学

出　　处：《传感器技术》1993年第3期18-20,28,共4页Journal of Transducer Technology

摘　　要：Zn(CH_3COO)_2通过溶胶凝胶法(Sol-Gel)被制备成粒度分布均匀的ZnO气敏薄膜,固有构参数已被确定。通过XRD(X射线衍射仪)和TEM(透射电镜)的分析结果,确认膜为ZnO多晶材料,并且利用高阻计测试了在不同气氛中试件的气体灵敏度。ZnO gas - sensitive films of fine grains which are uniformly distributed are prepared from Zn(CH3COO)2 through Sol-Gel process. Intrinsic fabric parameters were determined. By analysing the results of XRD and TEM, the films are thought as ZnO polycrystalline materials and the samples' gas-sensitivity are tested at different atmosphere by the high -resistance -meter.

关 键 词：溶胶凝胶法 氧化锌 气敏材料 薄膜 

分 类 号：TN304.055[电子电信—物理电子学]