电毛细力驱动纳米光刻成型技术原理分析  

Analysis of the principle of electro-capillary force driving nanolithography technology

作　　者：刘京昀 李长河[1] 

机构地区：[1]青岛理工大学机械工程学院,山东青岛266033

出　　处：《制造技术与机床》2014年第6期29-35,共7页Manufacturing Technology & Machine Tool

基　　金：国家自然科学基金重点项目"电毛细力驱动的纳米结构压印成形及其流变和界面行为研究"(90923040)

摘　　要：假设纳米光刻在理想条件下进行,无图形模板在电场中对聚合物进行流体动力学分析。通过控制变量法可得出电毛细力在宏观条件下的表现与光刻过程中产生电毛细力模板的各项参数有关,包括施加电压、聚合物相对介电常数、模板与聚合物之间的距离、聚合物的表面张力。实验分析了各项参数的改变对最不稳定波长的长度影响的相关关系。结果表明,结合实际工艺可以通过电毛细力驱动进行纳米光刻成型,通过控制各项参数可以控制成型的速度以及成型的效果。Suppose nanolithography is conducted under ideal conditions,analyze the polymer in an electric field and under the no graphics mold with hydrodynamics. By controlling the variable method we can draw that the capillary force under the condition of macroscopic is powered by the parameters of the template which is used to generate the capillary force,including the applied voltage,the relative dielectric constant of polymer,the distance between the template and the polymer,the surface tension of the polymer. Analyze the correlation between the length of the most unstable wave and the variation of each parameter by experiment. The results show that combining with the actual process can make nano lithography by the capillary force; also we can control the speed of forming and the shaping effect by controlling various parameters.

关 键 词：电湿润 电毛细力 纳米压印 

分 类 号：TN29[电子电信—物理电子学]