Mechanical Behaviors of Ti-Si-N Coatings Deposited by Bias Sputtering  

作　　者：P W Shum 

机构地区：[1]Advanced Coatings Applied Research Laboratory(ACARL),Department of Mechanical and Biomedical Engineering(MBE),City University of Hong Kong,Hong Kong,China

出　　处：《稀有金属材料与工程》2012年第S1期18-23,共6页Rare Metal Materials and Engineering

基　　金：Applied Research Grant(ARG)of City University of Hong Kong(9667026)

摘　　要：Ti-Si-N hard coatings were deposited on steel substrates by reactive unbalanced magnetron sputtering from Ti and Si elemental targets in a mixture of Ar and N2 gases.The influences of negative bias voltage(in the range of-30 to-80 V)on the mechanical properties of the coatings were investigated.In particular,the critical cycle during dynamic impact tests was employed to indicate the bonding strength of the coatings.It was found that the Ti-Si-N coatings prepared at lower constant bias voltages could effectively improve the adhesion and the cyclic impact performance,but their hardness was dropped significantly to 13 GPa at a bias of-30 V.Higher bias voltage values induced greater hardness.A maximum hardness of 47 GPa was obtained at a bias of-60 V.However,the coating adhesion was worse in this case,and the number of impact cycles(～8×10 3)that the coatings could endure was much shorter than that of TiN binary coatings(～2×104).On the other hand,the bias voltage was varied linearly from-40 to-60 V during Ti-Si-N deposition.Under this circumstance,the hardness of the coatings deposited with the bias-graded configuration remained very high(42 GPa),and the adhesion strength was improved substantially.Also,the critical impact cycle could reach as high as 1.8×104.Therefore,bias-graded deposition can provide an effective processing route to prepare Ti-Si-N superhard coatings with high adhesion strength and impact resistance.Ti-Si-N hard coatings were deposited on steel substrates by reactive unbalanced magnetron sputtering from Ti and Si elemental targets in a mixture of Ar and N2 gases.The influences of negative bias voltage(in the range of-30 to-80 V)on the mechanical properties of the coatings were investigated.In particular,the critical cycle during dynamic impact tests was employed to indicate the bonding strength of the coatings.It was found that the Ti-Si-N coatings prepared at lower constant bias voltages could effectively improve the adhesion and the cyclic impact performance,but their hardness was dropped significantly to 13 GPa at a bias of-30 V.Higher bias voltage values induced greater hardness.A maximum hardness of 47 GPa was obtained at a bias of-60 V.However,the coating adhesion was worse in this case,and the number of impact cycles(～8×10 3)that the coatings could endure was much shorter than that of TiN binary coatings(～2×104).On the other hand,the bias voltage was varied linearly from-40 to-60 V during Ti-Si-N deposition.Under this circumstance,the hardness of the coatings deposited with the bias-graded configuration remained very high(42 GPa),and the adhesion strength was improved substantially.Also,the critical impact cycle could reach as high as 1.8×104.Therefore,bias-graded deposition can provide an effective processing route to prepare Ti-Si-N superhard coatings with high adhesion strength and impact resistance.

关 键 词：TI-SI-N COATINGS MAGNETRON SPUTTERING BIAS voltage mechanical properties impact test 

分 类 号：TG174.44[金属学及工艺—金属表面处理]