SPUTTERING

作品数：392被引量：347H指数：7
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相关作者：李德军武莉莉黎兵邓湘云李卫更多>>
相关机构：天津师范大学中国科学院四川大学清华大学更多>>
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相关基金：国家自然科学基金国家重点基础研究发展计划福建省自然科学基金中国博士后科学基金更多>>
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Impurity sputtering model for ICRF edge plasma-surface interactions
《Chinese Physics B》2025年第3期168-175,共8页Quan-Zhi Zhang Ze-Xuan Liu Fang-Fang Ma Lei-Yu Zhang Nosir Matyakubov 
financially supported by the National MCF Energy R&D Program(Grant No.2022YFE03190100);the National Natural Science Foundation of China(Grant Nos.12422513,12105035,U21A20438);the Xiaomi Young Talents Program。
One of the primary concerns associated with ion cyclotron resonance heating(ICRH)is the enhanced impurity sputtering resulting from radio frequency(RF)sheath formation near plasma-facing components(PFCs),such as limit...
关键词：ion cyclotron resonance heating(ICRH) radio frequency(RF)sheath physical sputtering 
Indium oxide buffer layer for perovskite/Si 4-terminal tandem solar cells with efficiency exceeding 30%
《Journal of Energy Chemistry》2025年第3期189-196,共8页Liming Du Can Li Yuhui Jiang Fangfang Cao Chunmei Jia Zhi Wan Rui Meng Jishan Shi Chuanxiao Xiao Zhe Liu Zhen Li 
supported by National Natural Science Foundation of China(Grant Nos.52102304 and 52172238);Open Project of Shaanxi Laboratory of Aerospace Power(Grant No.2021SXSYS01-03);Shaanxi Bureau of Science and Technology(Award No.2022KWZ-07);the Fundamental Research Funds for the Central Universities(Grant No.3102019JC0005)。
Perovskite/Si tandem solar cells(TSCs)present great potential to surpass the Shockley-Queisser limit of single-junction solar cells for further advancing the power conversion efficiency(PCE)of solar cells.However,the ...
关键词：E-beam deposition SPUTTERING Transparent electrode Perovskite solar cells In_(2)O_(3) 
Status analysis on sputtering and erosion evaluation methods of ion optic systems
《Chinese Journal of Aeronautics》2025年第1期254-270,共17页Long MIAO Tongxun YANG Zhengxi ZHU Chang LU Zhiwen WU Ningfei WANG 
co-supported by the National Key R&D Program of China(No.2022YFB3403500);the National Natural Science Foundation of China(No.NSFC52202460);the China Postdoctoral Science Foundation(Nos.2021M690392,2021TQ0036,and 2023TQ0031)。
In the past few decades,ion engines have been widely used in deep-space propulsion and satellite station-keeping.The aim of extending the thruster lifetime is still one of the most important parts during the design st...
关键词：Electric propulsion Ion optic systems Sputtering yield Erosion characteristics Erosion pattern measurement Lifetime evaluation 
Advancing Al-doped ZnO thin films structural,optical and electrical properties of low temperature PET substrates via flash lamp annealing
《Journal of Semiconductors》2024年第12期47-60,共14页Juwon Lee Chang-Hyeon Jo Gwangseop Lee Min-Sung Bae Slawomir Prucnal Shengqiang Zhou Muhammad Zubair Khan Osama Gohar Mohsin Saleem Jung-Hyuk Koh 
supported by the MOTIE (Ministry of Trade,Industry,and Energy)in Korea,under the Fostering Global Talents for Innovative Growth Program (P0017308);supervised by the Korea Institute for Advancement of Technology (KIAT);supported by the MSIT (Ministry of Science and ICT),Korea,under the ITRC (Information Technology Research Center)support program (IITP-2024-2020-0-01655);supervised by the IITP (Institute of Information and Communications Technology Planning and Evaluation).
In this study, aluminum-doped zinc oxide(AZO) thin films were deposited onto a low-temperature polyethylene terephthalate(PET) substrate using DC magnetron sputtering. Deposition parameters included power range of 100...
关键词：flash lamp annealing AZO thin film PET SPUTTERING 
Extreme sputtering:Epitaxy of multifunctional oxides heterostructures
《Journal of Advanced Ceramics》2024年第12期1919-1930,共12页Soo Young Jung Dong-Hun Han Ruiguang Ning Min-Seok Kim Hyung-Jin Choi Ho Won Jang Seung-Hyub Baek 
the National Research Foundation of Korea(NRF)grant funded by the Ministry of Science and ICT(No.NRF-2020M3D1A2101933);from Korea Institute of Science and Technology(No.2E33181);supported by Alchemist Project Program(No.RS-2024-00422061,Development of Ultimate Semiconductor by Control of Band Curvature of Ultrawide Bandgap Materials)funded by the Ministry of Trade,Industry&Energy(MOTIE,Republic of Korea).
This review provides an in-depth exploration of low-damage sputtering techniques and their importance in synthesizing high-quality epitaxial multifunctional oxide heterostructures.This review examines the factors cont...
关键词：SPUTTERING low damage ion bombardment epitaxial thin films functional oxides 
Analysis and prediction of sputtering yield using combined hierarchical clustering analysis and artificial neural network algorithms
《Plasma Science and Technology》2024年第11期162-169,共8页Yu CHEN Jiawei LUO Wen LEI Yan SHEN Shuai CAO 
supported by the National Key Research and Development Program of China (No. 2020YFC2201101);the Shenzhen Key Laboratory of Intelligent Microsatellite Constellation (No. ZDSYS20210623091808026);Guangdong Basic and Applied Basic Research Foundation (No. 2021A1515110500)。
Sputtering is a crucial technology in fields such as electric propulsion, materials processing and semiconductors. Modeling of sputtering is significant for improving thruster design and designing material processing ...
关键词：SPUTTERING machine learning PLASMA 
Significantly improved high k dielectric performance:Rare earth oxide as a passivation layer laminated with TiO_(2) film被引量：2
《Journal of Rare Earths》2023年第9期1376-1384,I0004,共10页Shuan Li Weipeng Wang Youyu Lin Linlin Wang Xingguo Li 
supported by the China Postdoctoral Science Foundation (BX20200004);the National Key R&D Program of China (2017YFB0405902);the National Natural Science Foundation of China (51971004)。
In order to achieve a super gate dielectric performance,rare earth oxides featuring for large band gap,good thermodynamic stability and relatively high k value were selected to be laminated with TiO_(2)film to prepare...
关键词：Rare earth oxides Gate dielectric Thin film SPUTTERING Passivation layer 
Sputter Deposited Carbon Material based Fabry-Perot Sensor and Downhole Application
《Journal of Wuhan University of Technology(Materials Science)》2022年第6期1143-1149,共7页WANG Yingying LIU Xiaohui CHEN Xiaoan SUN Zhihui ZHAO Qingchao 
by the National Natural Science Foundation of China(No.61605101);the Natural Fund of Shandong Province(Nos.ZR2021MF127 and ZR2020LLZ010);the Peixin Fund of Qilu University of Technology(No.2022PX074)。
To prevent hydrogen-induced loss and achieve long-term effective parameters monitoring in harsh downhole environment,we proposed a Fabry-Perot sensor with vacuum sputter deposited carbon coating film,in which we emplo...
关键词：quartz substrate Fabry-Perot sensor vacuum sputtering carbon coating material 
Effect of chromium interlayer thickness on interfacial thermal conductance across copper/diamond interface被引量：2
《International Journal of Minerals,Metallurgy and Materials》2022年第11期2020-2031,共12页Xiaoyan Liu Fangyuan Sun Wei Wang Jie Zhao Luhua Wang Zhanxun Che Guangzhu Bai Xitao Wang Jinguo Wang Moon JKim Hailong Zhang 
financially supported by the National Natural Science Foundation of China (Nos. 51871014, 51571015);the National Youth Science Foundation, China (No. 51606193)
The thermal conductivity of diamond particles reinforced copper matrix composite as an attractive thermal management material is significantly lowered by the non-wetting heterointerface.The paper investigates the heat...
关键词：SPUTTERING DIAMOND metal/nonmetal interface interfacial thermal conductance time-domain thermoreflectance 
Sputtered SnO_(2)as an interlayer for efficient semitransparent perovskite solar cells被引量：1
《Chinese Physics B》2022年第11期67-73,共7页Zheng Fang Liu Yang Yongbin Jin Kaikai Liu Huiping Feng Bingru Deng Lingfang Zheng Changcai Cui Chengbo Tian Liqiang Xie Xipeng Xu Zhanhua Wei 
financially supported by the National Natural Science Foundation of China(Grant Nos.22179042,U21A2078,and 51902110);the Natural Science Foundation of Fujian Province,China(Grant Nos.2020J06021,2019J01057,and 2020J01064);Scientific Research Funds of Huaqiao University;Promotion Program for Young and Middle-aged Teacher in Science and Technology Research of Huaqiao University(Grant Nos.ZQN-PY607 and ZQN-806)。
SnO_(2)is widely used as the electron transport layer(ETL)in perovskite solar cells(PSCs)due to its excellent electron mobility,low processing temperature,and low cost.And the most common way of preparing the SnO_(2)E...
关键词：semitransparent perovskite solar cells SPUTTERING INTERLAYER hole blocking 
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