Effects of Al Content on Microstructure and Mechanical Property of CrAlN Coating Synthesized by Reactive Magnetron Sputtering  

作　　者：Li Wei Liu Ping Zheng Kangpei Ma Fengcang Liu Xinkuan Chen Xiaohong Yang Lihong 

机构地区：[1]Shanghai Univ Sci & Technol, Sch Mat Sci & Engn, Shanghai 200093, Peoples R China

出　　处：《稀有金属材料与工程》2012年第S1期425-428,共4页Rare Metal Materials and Engineering

基　　金：Shanghai Municipal Natural Science Foundation(11ZR1424600);Shanghai Development of Science and Technology Project(08110511600);Shanghai Leading Academic Discipline Project(J50503)

摘　　要：A series of CrAlN coatings with different Al content were synthesized on high-speed steel(M2)substrate by reactive direct current(DC)magnetron sputtering.The influences of Al content on the microstructure and mechanical property of CrAlN coatings were studied by scanning electron microscopy(SEM),X-ray diffraction(XRD),energy dispersive spectrum(EDS)and nano-indentation techniques,respectively.The results indicate that the coatings exhibit only fcc c-CrN phase when Al content is less than 65 at%,and fcc c-CrN and c-AlN phases when Al content is 78 at%.The coating with Al content of 60 at%exhibits high hardness and elastic modulus.The maximum hardness and elastic modulus values could reach 36.8 GPa and 459.5 GPa,respectively.A series of CrAlN coatings with different Al content were synthesized on high-speed steel(M2)substrate by reactive direct current(DC)magnetron sputtering.The influences of Al content on the microstructure and mechanical property of CrAlN coatings were studied by scanning electron microscopy(SEM),X-ray diffraction(XRD),energy dispersive spectrum(EDS)and nano-indentation techniques,respectively.The results indicate that the coatings exhibit only fcc c-CrN phase when Al content is less than 65 at%,and fcc c-CrN and c-AlN phases when Al content is 78 at%.The coating with Al content of 60 at%exhibits high hardness and elastic modulus.The maximum hardness and elastic modulus values could reach 36.8 GPa and 459.5 GPa,respectively.

关 键 词：CRALN COATING MAGNETRON SPUTTERING Al content microstructure mechanical PROPERTY 

分 类 号：TG146.4[一般工业技术—材料科学与工程]