Study on transmittance spectra of ITO thin films by ellipsometric method  

作　　者：SUN ZhaoQi1, CAO ChunBin123, CAI Qi1 & SONG XuePing1 1 School of Physics and Material Science, Anhui University, Hefei 230039, China 2 School of Sciences, Anhui Agricultural University, Hefei 230036, China 3 Key Laboratory of Opto-electronic Information Acquisition and Manipulation, Ministry of Education, Hefei 230036, China 

出　　处：《Science China(Technological Sciences)》2010年第7期1893-1896,共4页中国科学（技术科学英文版）

基　　金：supported by the National Natural Science Foundation of China (Grant No. 50872001);the Research Fund for the Doctoral Program of Higher Education of China (Grant No.20060357003);the Higher Educational Natural Science Foundation of Anhui Province (Grant No. KJ2008B015);the Open Foundation of Anhui Key Laboratory of Information Materials and Devices, and Key Project of Anhui Province (Grant No. 05021028)

摘　　要：ITO films with thicknesses (134+8) nm, grown on glass substrates by sputtering method, were post-annealed at the temperatures of 100, 200, 300 and 400°C for 1 h, respectively. The as-deposited ITO film was amorphous, but crystallized with annealing at elevated temperatures, as demonstrated by X-ray diffraction. The transmittance spectra of all samples were obtained and subsequently simulated by means of spectroscopic ellipsometry. The optical constants n and k of the films were extracted. With the annealing temperature increasing, the optical constants n and k of the films firstly decreased then increased in the whole investigated wavelength range. The optical band gaps of all films were evaluated and they varied between 3.74 and 3.93 eV.ITO films with thicknesses (134+8) nm, grown on glass substrates by sputtering method, were post-annealed at the temperatures of 100, 200, 300 and 400°C for 1 h, respectively. The as-deposited ITO film was amorphous, but crystallized with annealing at elevated temperatures, as demonstrated by X-ray diffraction. The transmittance spectra of all samples were obtained and subsequently simulated by means of spectroscopic ellipsometry. The optical constants n and k of the films were extracted. With the annealing temperature increasing, the optical constants n and k of the films firstly decreased then increased in the whole investigated wavelength range. The optical band gaps of all films were evaluated and they varied between 3.74 and 3.93 eV.

关 键 词：ITO films optical CONSTANTS TRANSMITTANCE SPECTRA SPECTROSCOPIC ELLIPSOMETRY analysis 

分 类 号：O484.41[理学—固体物理]