ELLIPSOMETRY

作品数：39被引量：23H指数：2
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Nondestructive monitoring of annealing and chemical-mechanical planarization behavior using ellipsometry and deep learning
《Microsystems & Nanoengineering》2023年第2期345-354,共10页Qimeng Sun Dekun Yang Tianjian Liu Jianhong Liu Shizhao Wang Sizhou Hu Sheng Liu Yi Song 
supported by the National Key Research and Development Program of China(2022YFB3206000);the Key Research and Development Program of Hubei(2021BAA173)。
The Cu-flling process in through-silicon via(TSV-Cu)is a key technology for chip stacking and three-dimensional vertical packaging.During this process,defects resulting from chemical-mechanical planarization(CMP)and a...
关键词：ANNEALING DEFECT CHEMICAL 
Advanced Mueller matrix ellipsometry:Instrumentation and emerging applications被引量：3
《Science China(Technological Sciences)》2022年第9期2007-2030,共24页CHEN XiuGuo GU HongGang LIU JiaMin CHEN Chao LIU ShiYuan 
supported by the National Natural Science Foundation of China(Grant Nos.51727809,52022034,62175075,and 52130504);the Key Research and Development Plan of Hubei Province(Grant Nos.2020BAA008 and 2021BAA013)。
Mueller matrix ellipsometry(MME)provides the 4×4 Mueller matrix of a sample under test,which determines how the state of polarization is changed as light interacts with the sample.Due to the redundant information con...
关键词：ELLIPSOMETRY Mueller matrix Mueller matrix ellipsometry imaging ellipsometry high-speed ellipsometry 
Analytical Study of Precision Optical Glass Surface and Its Effect on Some Polarimetric Parameters
《Journal of Surface Engineered Materials and Advanced Technology》2022年第1期14-21,共8页Naglaa Aboe-Ella Mahmoud 
The performance of many optical glass elements depends on the structure of the surface. The high refractive index of flint glass is advantageous in constructing some optical elements (lenses, prisms, beam splitters, ...
关键词：Optical Glass ELLIPSOMETRY Oblique Incidence Retarder Surface Layer and Retardance 
Record-high near-band-edge optical nonlinearities and two-level model correction of poled polymers by spectroscopic electromodulation and ellipsometry
《Science China Chemistry》2022年第3期584-593,共10页Taili Liu Di Zhang Md Rashedul Huqe Wen Wang Juan Antonio Zapien Sai-Wing Tsang Jingdong Luo 
supported by the Fundamental Research Project Funding from Shenzhen Science & Technology Innovation Committee (JCYJ20180507181718203);the National Natural Science Foundation of China (21975213);the Research Grants Council (RGC) of Hong Kong (11306320, 11303618, 11210218);the City University of Hong Kong (9610389, 9680263, 9610454);the Innovation and Technology Commission of Hong Kong (ITS/461/18)。
The determination of nonlinearities near the band edge of organic and polymeric electro-optic(EO)materials is important from the viewpoint of molecular nonlinear optics(NLO)and photonic device applications.Based on tr...
关键词：poled polymers ELECTROABSORPTION electro-optic effect second-order nonlinear susceptibilities 
Terahertz Bessel Beam Applied to Thickness Measurement of Ellipsometry Methods
《Journal of Computer and Communications》2021年第12期125-132,共8页Siyu Tu Kejia Wang Jinsong Liu Zhengang Yang 
This paper introduces a Terahertz (THz) ellipsometer thickness measurement method based on Bessel beams. The ellipsometry method is used to measure the thickness of film in the THz ba...
关键词：Bessel-Beam ELLIPSOMETRY Diffraction-Free THZ 
Optical properties of Sr_(x)Ba_(1−x)Nb_(2)O_(6)nanoscale films(x=0.5 and 0.61)grown by RF-cathode sputtering in an oxygen atmosphere
《Journal of Advanced Dielectrics》2021年第5期48-53,共6页S.V.Kara-Murza K.M.Zhidel N.V.Korchikova Yu.V.Tekhtelev A.V.Pavlenko L.I.Kiseleva 
The authors are grateful to V.B.Shirokov for conducting studies of the films surface by the AFM method.This work was carried out within the framework of the State Assignment of the SSC RAS(Theme of State Registration No.01201354247).
The research findings of the phase composition,nanostructure and optical properties of strontium-barium niobate thin films are discussed.Sr_(x)Ba_(1−x)Nb_(2)O_(6)nanosized films(x=0.5 and 0.61)were characterized by XR...
关键词：ELLIPSOMETRY optical parameters strontium-barium niobates thin films 
Machine learning powered ellipsometry被引量：4
《Light(Science & Applications)》2021年第4期582-588,共7页Jinchao Liu Di Zhang Dianqiang Yu Mengxin Ren Jingjun Xu 
the National Key R&D Program of China(2017YFA0305100,2017YFA0303800,and 2019YFA0705000);National Natural Science Foundation of China(92050114,62076140,91750204,61775106,11904182,61633012,11711530205,11374006,12074200,and 11774185);Guangdong Major Project of Basic and Applied Basic Research(2020B0301030009);111 Projea(B07013);PCSIRT(IRT0149);Open Research Program of Key Laboratory of 3D Micro/Nano Fabrication and Characterization of Zhejiang Province;Tianjin Youth Talent Support Program;Fundamental Research Funds for the Central Universities(010-63201003,010-63201008,and 010-63201009);。
Ellipsometry is a powerful method for determining both the optical constants and thickness of thin films.For decades,solutions to ill-posed inverse ellipsometric problems require substantial human-expert intervention ...
关键词：consuming INVERSE essentially 
Optical Band Gap, Oxidation Polarizability, Optical Basicity and Electronegativity Measurements of Silicate Glasses Using Ellipsometer and Abbe Refractometer被引量：2
《New Journal of Glass and Ceramics》2021年第1期1-33,共33页Zahid Hussain 
The values of refractive index (n) for silicate glasses (silica, soda lime and borosilicate 7059) are decreased from 1.5119 to 1.5111, 1.5086 to 1.5065 and 1.5296 to 1.5281, re...
关键词：Glass Optical Properties Thermal Properties Physical Properties ELLIPSOMETRY 
Modelling of Photovoltaic Modules Optical Losses Due to Saharan Dust Deposition in Dakar, Senegal, West Africa被引量：1
《Smart Grid and Renewable Energy》2020年第7期89-102,共14页Dialo Diop Mamadou Simina Drame Moussa Diallo David Malec Dominique Mary Philippe Guillot 
This study aims to evaluate the optical losses of photovoltaic modules due to Saharan dust deposition in Dakar, Senegal, West Africa. For this purpose, an air-dust-glass system is mo...
关键词：Dust Characterization Modeling ELLIPSOMETRY PV Transmittance Solar Panel Spin Coating X-Ray Fluorescence 
Gradient refractive structured NiCr thin film absorber for pyroelectric infrared detectors
《Chinese Physics B》2019年第6期419-423,共5页Yunlu Lian He Yu Zhiqing Liang Xiang Dong 
Project supported by the National Natural Science Foundation of China(Grant Nos.61875031 and 61421002)
A gradient refractive structured NiCr film that has a high extinction coefficient at far infrared range(8-μm–24 μm) is presented as an absorber for pyroelectric infrared detectors. The absorber features high absorp...
关键词：PYROELECTRIC infrared detector SPECTROSCOPIC ELLIPSOMETRY deposition thermal sensing 
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