Terahertz Bessel Beam Applied to Thickness Measurement of Ellipsometry Methods  

作　　者：Siyu Tu Kejia Wang Jinsong Liu Zhengang Yang Siyu Tu;Kejia Wang;Jinsong Liu;Zhengang Yang(Wuhan National Laboratory for Optoelectronics, Huazhong University of Science and Technology, Wuhan, China)

机构地区：[1]Wuhan National Laboratory for Optoelectronics, Huazhong University of Science and Technology, Wuhan, China

出　　处：《Journal of Computer and Communications》2021年第12期125-132,共8页电脑和通信（英文）

摘　　要：<div style="text-align:justify;"> This paper introduces a Terahertz (THz) ellipsometer thickness measurement method based on Bessel beams. The ellipsometry method is used to measure the thickness of film in the THz band. And the thickness of film could be measured in the range of hundreds of microns which the measurement of film thickness by ellipsometer is usually only a few hundred nm in visible light. In addition, the photon energy of the THz-wave is very low and has little damage to the film. The THz Bessel beam has the characteristics of self-healing and diffraction-free. It can make the film thickness measurement within the diffraction-free distance, which is conducive to the flexibility of the ellipsometer system. We use a multi-frequency method to measure film with two-dimensional finite different time domain (FDTD) to numerical simulation analysis of light intensity successfully. </div><div style="text-align:justify;"> This paper introduces a Terahertz (THz) ellipsometer thickness measurement method based on Bessel beams. The ellipsometry method is used to measure the thickness of film in the THz band. And the thickness of film could be measured in the range of hundreds of microns which the measurement of film thickness by ellipsometer is usually only a few hundred nm in visible light. In addition, the photon energy of the THz-wave is very low and has little damage to the film. The THz Bessel beam has the characteristics of self-healing and diffraction-free. It can make the film thickness measurement within the diffraction-free distance, which is conducive to the flexibility of the ellipsometer system. We use a multi-frequency method to measure film with two-dimensional finite different time domain (FDTD) to numerical simulation analysis of light intensity successfully. </div>

关 键 词：Bessel-Beam ELLIPSOMETRY Diffraction-Free THZ 

分 类 号：O17[理学—数学]