稀释气体对CVD-SiC纤维性能的影响  

Effect of Dilute Gas on Performance of CVD-SiC Fibers

作　　者：黄浩[1] 陈大明[1] 仝建峰[1] 李宝伟[1] 王岭[1] 

机构地区：[1]北京航空材料研究院先进复合材料国防科技重点实验室,北京100095

出　　处：《人工晶体学报》2009年第S1期359-362,共4页Journal of Synthetic Crystals

基　　金：总装备部预研合作项目资助

摘　　要：在自行设计制造的直流电阻加热CVD装置上制备SiC纤维,研究了CH3SiHCl2-CH3SiCl3-H2-Ar体系中在W芯表面化学气相沉积SiC涂层工艺,考察了稀释气体Ar气含量对化学气相沉积SiC涂层的显微结构的影响。并对涂层表面形貌及成分进行了SEM,XRD分析。结果表明:Ar气不但起到了输送气体源,排出废气、增大流量、使反应室中前后端的反应气体比例尽量保持一致的作用,还一个重要原因是可以很好的平衡空间的温度差。当稀释气体的含量达到25%时,纤维的性能最好。SiC fiber was prepared by CVD process using DC electrically heating.The SiC coating by CVD process in CH3SiHCl2-CH3SiCl3-H2-Ar system was studied by SEM and XRD.The effect of dilute gas of Ar on the morphologies of CVD SiC coating are investigated.The experimental results show that the role of Ar gas is to deliver the gas,to exhaust the gas,to increase the flux,to keep the right proportion of reaction gas at the two ends of reactor tube,and further to balance the chamber.The CVD SiC coatings is well when the flux of dilute gas arrived at 25%.

关 键 词：化学气相沉积 SIC纤维 稀释气体 

分 类 号：TQ343.6[化学工程—化纤工业]