Up-to-date issues and strategies for developing nanometrology standards  

作　　者：Yan FANG1, Xinju Yang2 Zhanghai Chen2 1 Zhong Shan Hospital,Fudan University, Shanghai XuHui Region 200032 136 Yi Xue Yuan Road 2 Fudan University, Shanghai YangPu Region 200433 220 Han Dan Road 

出　　处：《生物物理学报》2009年第S1期171-172,共2页Acta Biophysica Sinica

基　　金：Yan Fang acknowledges research grants from Shanghai Technology Committee (STC) 03JC14020 &0452nm085;National Science Foundation of China (NSFC) 30470409;Shanghai Xu Hui Region of Science and Technology Committee RCT2008010

摘　　要：Unbroken chain of traceability is currently unsettled issues for developing national/ international nanometer scale metrology standards. The present paper will address

关 键 词：NANOMETROLOGY Methods STANDARDS TRACEABILITY 

分 类 号：TB383.1[一般工业技术—材料科学与工程]