用于半导体器件参数检测的比例差值谱仪  

Proportional Differential Spectroscopic Instrument for Semiconductor Device Parameters Measurement

作　　者：许铭真[1] 马金源 谭长华[1,2] 谭映 王洁 靳磊[1] 

机构地区：[1]北京大学微电子研究院,北京100871 [2]北信通微电子系统公司,北京100871

出　　处：《半导体技术》2008年第S1期365-367,375,共4页Semiconductor Technology

摘　　要：比例差值谱仪运用了独创的在线综合检测分析的专利技术——比例差值谱技术,实现了半导体器件的关键电学特征参数如饱和电流、饱和电压、阈值电压、载流子迁移率等直接、准确、便捷地提取和薄膜材料的缺陷分析。该产品是基于Windows操作系统计算机程控的适用于半导体器件表征和可靠性评估应用的集成化分析仪器。The proportional differential spectroscopic instrument demonstrated the real-time test and analysis ability,which implemented the patents based on proportional differential spectroscopy technique,(Patent 1:ZL90 1 04535.7,Patent 2:00100121.3).It makes data acquisition and extraction faster and more convenient,especially for semiconductor devices characterization,such as saturation current,saturation voltage,threshold voltage,carrier mobility and so on,and defect analysis of thin films.This integrated analysis system was PC-based running on Windows operation environment,which was designed for semiconductor device characterization and reliability evaluation purpose.The system architecture and product performance is able to meet the challenging requirements posed by current and future devices.

关 键 词：比例差值谱仪 甚大规模集成电路纳米尺度器件 参数检测 

分 类 号：TN303[电子电信—物理电子学]