Thermodynamic Calculation of Si_3N_4-SiC Phase Equilibrium  

作　　者：Yali LI and Zhuangqi HU (National Key Lab. of Rapidly Solidified Nonequilibrium Alloys, Institute of Metal Research,CAS, Shenyang, 110015, China)Yang GAO and Yong LIANG (Laser Processing Dept., Institute of Metal Research, CAS, Shenyang, 110015, China) 

出　　处：《Journal of Materials Science & Technology》1995年第6期466-468,共3页材料科学技术（英文版）

摘　　要：SisN4 and SiC phase stability via gas phase reactions among SiO, CO/CO2 and N2 has been calculated based on thermochemical equilibrium. The influences of carbon activity (αC), and the partial pressure of SiO (PSiO), CO (PCO) and N2 (PN2) on the Si3N4-SiC stability have been studied and the related phase diagrams have been constructed. Result shows that the lowering αC and PCO/PSiO ratio and the increasing PN2 greatly elevate the Si3N4-SiC equilibrium temperature. Some previously observed experimental results related to Si3N4 and SiC formation at different temperature from the gas phase reactions have been discussed and some guides for sintering and synthesis Of the Si3N4 materials have been proposedSisN4 and SiC phase stability via gas phase reactions among SiO, CO/CO2 and N2 has been calculated based on thermochemical equilibrium. The influences of carbon activity (αC), and the partial pressure of SiO (PSiO), CO (PCO) and N2 (PN2) on the Si3N4-SiC stability have been studied and the related phase diagrams have been constructed. Result shows that the lowering αC and PCO/PSiO ratio and the increasing PN2 greatly elevate the Si3N4-SiC equilibrium temperature. Some previously observed experimental results related to Si3N4 and SiC formation at different temperature from the gas phase reactions have been discussed and some guides for sintering and synthesis Of the Si3N4 materials have been proposed

关 键 词：SIC Thermodynamic Calculation of Si3N4-SiC Phase Equilibrium SIO 

分 类 号：O642[理学—物理化学]