大气压辉光放电研究现状及应用前景  

Status and application prospects of atmospheric pressure glow discharge studies

作　　者：张锐[1] 刘鹏[1] 詹如娟[1] 

机构地区：[1]中国科学技术大学近代物理系,合肥230026

出　　处：《物理》2004年第6期430-434,共5页Physics

摘　　要：大气压辉光放电由于均匀性好、能量效率高并且不需要真空系统 ,正日益受到人们重视和研究 .文章综述了大气压辉光放电的研究进展 ,包括实验条件、放电特征、放电机理以及最新的诊断方法 ,还介绍它在薄膜沉积、材料表面改性。Recently there has been increasing interest in atmospheric pressure glow discharge systems because they have good uniformity, high energy efficiency and do not need high vacuum system. We summarize recent developments of studies on atmospheric pressure glow discharges, including experimental conditions, discharge characteristics, discharge mechanism and new diagnostic methods. There are great prospects for a number of industrial applications, such as thin film deposition, surface modification, disinfection etc.

关 键 词：大气压辉光放电 均匀性 低温等离子体 能量效率 放电特征 薄膜沉积 材料表面改性 

分 类 号：O461[理学—电子物理学]