基于MEMS的高g值加速度计及在炮弹侵彻双层钢靶试验中的应用  

High-g accelerometer based on MEMS and its application in a projectile penetrating double-layer steel target test

作　　者：文丰[1] 石云波[1] 周振[1] 任勇峰[1] 

机构地区：[1]中北大学电子测试技术国家重点实验室,山西太原030051

出　　处：《振动与冲击》2013年第19期165-169,共5页Journal of Vibration and Shock

基　　金：国家自然科学基金重点项目(50535030)

摘　　要：为获取穿甲弹侵彻双层钢靶板过程的高g值冲击过载数据,研制了具有四端全固支的梁岛结构压阻式MEMS的高g值传感加速度计。该加速度计梁根部和端部采用倒角结构,增强了器件强度;采用改进型环氧树脂与不锈钢壳体相结合的强化封装方法,提高了加速度计的抗过载能力;该加速度计与具有特种缓冲结构的高过载电子存储记录器组成了一体化的高过载测试装置。在穿甲弹侵彻双层钢靶的试验中获取了最高峰值达43万g的完整侵彻过程数据,对数据进行截止频率为10 kHz低通滤波后得到侵彻第一层钢靶的峰值过载为-83 281 g,侵彻第二层钢靶的峰值为-115 185 g。试验结果表明该加速度计是一种理想的高过载测试装置,能为相关工程设计及实践提供重要依据。In order to obtain impact data of armour-piercing cannonball penetrating a double-layer steel target tests, a MEMS high g piezoresistive accelerometer having a four-end clamped beam-island structure was developed. Chamfers were added at the root and the end of the microcantilever to increase the intensity of the structure. The intensive encapsulation method using modified epoxy resin with a stainless steel shell was adopted to enhance the accelerometer's anti-overload ability. An integrated high overload test device was designed, it was composed of a high-g accelerometer and a high overload electronic memory recorder with a special buffer structure. In tests, the peak value of 430, 000 g in the penetrating process was obtained, and the overload of the first layer was up to 83281g and the overload of the second layer reached 115185g when the lower-pass filtering cut-off frequency was 10 kHz. This results demonstrated that the accelerometer is an ideal high overload test instrument, it can provide an important reference for the related engineering design and practice.

关 键 词：MEMS 高g值传感器 侵彻 双层钢靶 滤波分析 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置] O384[自动化与计算机技术—控制科学与工程]