Ti-Cr合金薄膜局域结构的XAFS研究  

XAFS Study of Local Structure in Ti-Cr Alloy Films

作　　者：张延志[1] 管卫军[1] 郑黎荣[2] 赖新春[1] 汪小琳[3] 

机构地区：[1]表面物理与化学重点实验室,四川绵阳621907 [2]中国科学院高能物理研究所,北京100049 [3]中国工程物理研究院,四川绵阳621900

出　　处：《稀有金属材料与工程》2013年第S2期288-291,共4页Rare Metal Materials and Engineering

基　　金：表面物理与化学重点实验室开放基金(SPC201006)

摘　　要：为了研究薄膜厚度对Ti-Cr合金薄膜局域结构的影响,通过磁控溅射沉积技术制备了不同厚度的Ti-Cr合金薄膜试样,合金薄膜中Ti和Cr的含量接近。利用X射线吸收精细结构(XAFS)谱和X射线衍射(XRD)仪研究了Ti-Cr合金薄膜的局域结构状态。X射线吸收近边结构谱(XANES)分析结果显示,元素的吸收边能量E0随薄膜厚度出现有规律的变化。XRD和扩展X射线精细结构吸收谱(EXAFS)结果显示,制备的合金薄膜为长程无序的非晶态,并分析了薄膜厚度对合金薄膜局域结构的影响。In order to investigate the effect of thickness on local structure of film,the samples of Ti-Cr alloys film with different thickness were prepared by Magnetic Sputtering Deposition.The content of Ti and Cr is approximate in all samples.The local structure of Ti-Cr alloys films were studied using X-ray absorption fine structure(XAFS) and X-ray diffraction(XRD).The result of X-ray absorption near edge structure(XANES) indicates the ionization energy of k is affected by the thickness of films.The analysis of XRD and extended X-ray absorption fine structure(EXAFS) indicate that the structure of films is amorphism.The thicknesses also affect the local structure of Ti-Cr alloys films in some case.

关 键 词：Ti-Cr合金 XAFS 薄膜 局域结构 非晶 

分 类 号：TB383.2[一般工业技术—材料科学与工程]