基于复合处理技术CrN基固体自润滑复合膜的原位合成与摩擦学性能研究(英文)  

Synthesis and Tribological Properties of CrN-Based Solid Self-Lubricant Composite Coating by Composite Treatment Technique

作　　者：蔡志海[1] 杨臻[1] 李奇[1] 底月兰[1] 张平[1] 

机构地区：[1]装甲兵工程学院机械产品再制造国家工程研究中心,北京100072

出　　处：《稀有金属材料与工程》2013年第S2期504-507,共4页Rare Metal Materials and Engineering

基　　金：National Nature Science Foundation of China(50901089);National Key Laboratory for Remanufacturing under Grant(9140C85020710OC8506)

摘　　要：采用磁控溅射与低温离子渗硫复合处理工艺原位制备了CrN基固体自润滑复合膜,采用X射线光电子能谱(XPS)、俄歇电子能谱仪(AES)、扫描电子显微镜(SEM)和能谱仪(EDS)等方法对复合膜的显微组织进行了分析,结果表明,CrN基固体自润滑复合膜中含有Cr、Mo、N、S元素,主要相结构为CrN和MoS2,及少量氧化物;S元素渗入深度约500 nm,分析结果表明Cr-Mo-N膜渗硫处理后,渗硫层中主要合成了MoS2润滑相,同时,通过比较不同封存试样方式,深入分析了渗硫层中氧元素的来源,并对CrN基固体自润滑复合膜的成膜机理进行了探讨。在室温油润滑条件下在CrN基固体自润滑复合膜的摩擦系数低于Cr-Mo-N膜,然后对CrN基固体自润滑复合膜的润滑机理进行了分析。The CrN-based solid self-lubricant composite coating was obtained by magnetron sputtering and low-temperature ion sulfuring.The XPS,AES and SEM equipped with EDS were used to observe and analyze the microstructure of the composite coating.The results show that there are Cr,Mo,N and S in the composite coating,and the phase structure is CrN,MoS2 and a few oxide.The element S is implanted 500 nm in depth.For the sulfurized layer is extremely apt to be oxidized,the source of element O was analyzed through comparative studies on different methods for preservation of specimens,and the film-forming mechanism of CrN-based solid self-lubricant composite coating was discussed.And the CrN/MoS2 composite films perform better than Cr-Mo-N films in terms of friction coefficient under oil lubrication condition at room temperature.Then the lubrication mechanism for CrN/MoS2 composite films was analyzed.

关 键 词：CrN基 固体自润滑 复合膜 显微组织 摩擦学性能 

分 类 号：TB383.2[一般工业技术—材料科学与工程]