泡生法蓝宝石晶体炉内隔热屏损坏机理研究  

Broken Inner Heat Insulation Screen of Kyropoulos Sapphire Crystal Grower

作　　者：承刚[1] 孟秀清[1] 董珊[1] 

机构地区：[1]中国科学院半导体研究所,北京100086

出　　处：《稀有金属材料与工程》2013年第S2期517-519,共3页Rare Metal Materials and Engineering

摘　　要：泡生法蓝宝石晶体炉钼制内隔热屏是炉内温场的一个重要部件,但损坏的几率非常高。为提高内隔热屏的使用寿命降低整个晶体的生产成本,通过对损坏的蓝宝石晶体炉内隔热屏轴向厚度分布测量,结合钼材料真空蒸发速率与温度的关系对其损坏机理进行了研究。结果表明:钼材料的蒸发速率在中间区域很高,在上下两端非常缓慢。根据其厚度分布,针对对传统的双层结构内隔热屏缺陷,提出了更为经济合理的三层内隔热层设计思想,提出了通过降低真空度、增加中间区域厚度延长隔热屏寿命等设想。It is important for decreasing costs of inner screen of Kyropoulos sapphire crystal grower which gets the cost of sapphire making higher.The thickness distribution of broken inner screen was measured directly showing the distribution of vaporization speed of inner screen.It is found that there are three zones with different thickness on broken inner screen and breaking only happens on the fast vaporizing zone.Meanwhile stable zone is vaporized very slowly.So inner screen with three layers structure will cost less than traditional two layers structure.The study also shows that the life of inner screen would be prolonged by vacuum-reduceding and thickening middle layer of inner screen.

关 键 词：泡生法 蓝宝石晶体炉 内隔热屏 

分 类 号：TQ164[化学工程—高温制品工业]