PVD法制备TiN/AlTiN涂层的摩擦与磨损性能  

Friction and Wear Properties of TiN/AlTiN Coatings Prepared by PVD

作　　者：叶存冬[1] 龙丹[1] 孔德军[1,2] 王文昌[3] 李奇林[1] 

机构地区：[1]常州大学机械工程学院,江苏常州213016 [2]江苏省链传动数字化设计与制造工程技术研究中心,江苏常州213102 [3]常州大学石油化工学院,江苏常州213164

出　　处：《四川大学学报（工程科学版）》2013年第S1期144-148,共5页Journal of Sichuan University (Engineering Science Edition)

基　　金：常州市知识产权计划推进资助项目(CK20120003);江苏省研究生科研创新计划资助项目(CXLX11-0388;CXZZ12-731)

摘　　要：采用物理气相沉积法在Cr12MoV钢基体上沉积TiN和AlTiN涂层,用扫描电镜、X射线衍射仪和划痕仪分析了涂层表面与界面形貌、物相和结合强度,并进行了摩擦与磨损试验。结果表明,TiN和AlTiN涂层具有较高硬度,AlTiN涂层表面粗糙度优于TiN涂层,TiN涂层表面轮廓算术平均偏差Ra为328.91 nm,AlTiN表面轮廓算术平均偏差Ra为112.49 nm;TiN涂层结合强度为28.85 N,而AlTiN涂层结合强度为27.35 N;AlTiN摩擦因数在磨合期和波动期略高于TiN涂层,在稳定期摩擦因数基本接近,维持在0.44～0.46;AlTiN涂层韧性比TiN涂层有一定的提高,其磨损性能优于TiN涂层。The TiN and AlTiN coatings were prepared on Cr12MoV steel substrate by physical vapor deposition(PVD) method,the morphologies,phase and bonding strength of the coating surface and interface were analyzed by SEM,XRD and scratching tester,respectively,and the friction-wear test of the coating was processed.The results showed that TiN and AlTiN coatings have higher hardness,the surface roughness of the AlTiN coating is better than that of the TiN coating,the average deviation of the surface profile arithmetic Ra of TiN coating is 328.91 nm,while that of AlTiN coating is 112.49 nm.Binding strength of TiN coating is 28.8 N,and that of AlTiN coating is only 15.05 N.Friction coefficient of AlTiN coating is slightly higher than that of TiN coating in running-in period and fluctuation period,and friction coefficients of the two coatings are almost same in the stable period,which maintains at about 0.44~0.46.Compared with TiN coating,the toughness and wear performance of AlTiN coating are improved.

关 键 词：TIN涂层 AlTiN涂层 物理气相沉积 结合强度 摩擦因数 磨损性能 

分 类 号：TG174.444[金属学及工艺—金属表面处理]