基于NOA73微球与SU-8微柱的微探针制作(英文)  

Fabrication of microprobe based on NOA73 and SU-8

作　　者：王伟[1,2] 贾志浩[1,2] 段俊萍[1,2] 崔建利[1,2] 徐苏坪[1,2] 张斌珍 

机构地区：[1]中北大学电子测试技术重点实验室,太原030051 [2]中北大学仪器科学与动态测试教育部重点实验室,太原030051

出　　处：《强激光与粒子束》2015年第2期19-23,共5页High Power Laser and Particle Beams

基　　金：surpported by National Science Foundation of China(61401405,51475438);Basic Research Priorities Program of Shanxi(2014011021-4);Program for New Century Excellent Talents in University(130951862)

摘　　要：集成紫外固化胶NOA73微球与SU-8微柱制造的亚毫米探针,可以作为关键部件应用于三坐标测量机。NOA73微球通过NOA73对其他溶液的界面张力形成,柱子由深紫外光穿过微球曝光SU-8形成。这种新技术利用甘油补偿NOA73与空气折射率差,使得紫外光透过NOA73微球后保持接近平行。最终得到高深宽比的探针结构,高度超过1 200μm,微柱侧壁与基底呈89°。Fabrication of microprobe integrated with a UV-curable adhesive,NOA73 microspheres and SU-8micro pillars is presented,which can be applied to coordinate measurement machine(CMM)as a key component.The NOA73 microsphere is formed by the interfacial tension between NOA73 and other solution,the pillar is formed from SU-8deep ultraviolet lithography.The glycerol is coated for compensating the refractive index difference between NOA73 and air,thus UV light still keep parallel,after propagating through the NOA73 microspheres.The high aspect ratio microprobe is obtained with the height above 1 200μm and the angle between micro-pillar and substrate is 89°.

关 键 词：探针 坐标测量机 折射率补偿 微机电系统 

分 类 号：TH721[机械工程—仪器科学与技术]