液相电化学法制备类金刚石薄膜及其摩擦性能研究  

Liquid electro-deposition technique and friction behavior for diamond-like carbon films

作　　者：丰杰 范瑛[2] 李建国[2] 

机构地区：[1]中南大学材料科学与工程学院,长沙410083 [2]中国工程物理研究院总体工程研究所,四川绵阳621900

出　　处：《强激光与粒子束》2015年第2期190-193,共4页High Power Laser and Particle Beams

基　　金：中物院超精密加工技术重点实验室基金项目(ZZ13005)

摘　　要：采用自行设计的液相法沉积装置,以甲醇有机溶剂作为碳源,利用液相电化学沉积技术在不锈钢及Si基底上制备了类金刚石薄膜;用扫描电镜、Raman光谱仪表征了沉积薄膜的表面形貌和结构;用UMT-2M摩擦磨损试验机对两种沉积薄膜进行了摩擦性能测试。结果表明:经电化学沉积的类金刚石薄膜均匀、致密,表面粗糙度小;Raman光谱在1 332cm-1处有强的谱峰,与金刚石的特征峰相吻合,其中不锈钢基底上薄膜的sp3含量更高;不锈钢基底沉积膜的摩擦系数为0.12,Si片基底沉积膜的摩擦系数为0.10;不锈钢基底沉积膜的耐磨性较Si片沉积膜高。The equipment of liquid electro-deposition for diamond-like carbon(DLC)films was set up.DLC films were deposited on stainless steel and Si substrates by electrolysis in a methanol solution with a pulse-direct current power supply.The morphology and microstructure of the deposited DLC films were analyzed using scanning electron microscopy(SEM)and Raman spectroscopy.Friction and wear properties of the films were tested by the UMT-2Mfriction-wear tester of CETR Corporation.The experimental results show that DLC films are smooth and compact.Raman spectroscopy analysis confirmed the presence of a strong peak at 1332cm-1,which is assigned to crystalline diamond.The content of sp3 for the stainless steel substrate is higher than that for the Si substrates.At ambient conditions,the friction coefficient of DLC films on stainless steel substrates is 0.12,and the friction coefficient of DLC films on Si substrates is 0.10.The wear-resistant property of DLC films on stainless steel substrates is more excellent than that of DLC films on Si substrates.

关 键 词：液相电化学沉积 类金刚石薄膜 RAMAN光谱 摩擦性能 

分 类 号：TB383.2[一般工业技术—材料科学与工程]