Cr掺杂对GLC薄膜结构及其摩擦学性能的影响  

Effect of Cr Doping on the Microstructure and Tribological Performances of Graphite- like Carbon Films

作　　者：王佳凡[1,2] 王永欣 陈克选[2] 李金龙 郭峰 

机构地区：[1]中国科学院宁波材料技术与工程研究所中国科学院海洋新材料与应用技术重点实验室,浙江宁波315201 [2]兰州理工大学材料科学与工程学院,甘肃兰州730050

出　　处：《摩擦学学报》2015年第2期206-213,共8页Tribology

基　　金：国家973计划(2013CB632300);国家自然科学基金项目(51202261)资助~~

摘　　要：采用磁控溅射方法制备类石墨碳膜(GLC)及掺杂金属Cr的类石墨碳膜(GLC-Cr),利用场发射扫描电子显微镜(SEM)、拉曼光谱仪(Raman)、X射线光电子能谱仪(XPS)、纳米压痕仪等测试技术对比分析两薄膜样品的结构及机械性能,利用UMT-3多功能摩擦磨损试验机考察其在大气、去离子水、发动机油3种环境下的摩擦学性能.结果表明:本实验参数下制备的类石墨碳膜中,Cr的掺杂促使了类石墨碳膜中sp2杂化键的形成,降低了GLC薄膜的硬度及弹性模量,但在3种不同环境下均使得类石墨碳膜的摩擦学性能得到明显改善.其中水介质的存在可明显降低类石墨碳膜的摩擦系数,而油润滑介质虽未使得其摩擦系数明显降低,但其摩擦曲线波动性及磨损率均最小.Graphite- like carbon( GLC) film and graphite- like carbon film doped with Cr( GLC- Cr) were fabricated successfully using magnetron sputtering technique. The structure and mechanical properties that GLC and GLC- Cr films were characterized by field emission scanning electron microscopy,Raman spectroscopy,X- ray photoelectron spectroscopy and nanoindentor. The tribological performance in different environments of films were investigated by UMT- 3 multi-functional tribometer. Experimental results indicated that,compared with the pure GLC film,the content of sp2 bonds in graphite- like carbon films were increased and the hardness was decreased. And the tribological properties of graphite- like carbon film was improved significantly in three different environments by using Cr as dopant. The friction coefficient of GLC and GLC- Cr films decreased in the presence of water. However,the volatility of friction curve and wear rate were all the lowest and exhibited more excellent self- adapted friction reducing and antiwear properties under the environment of oil.

关 键 词：磁控溅射 GLC膜 CR掺杂 摩擦学性能 

分 类 号：TQ127.11[化学工程—无机化工] TB383.2[一般工业技术—材料科学与工程]