微条气体室基板研究(英文)  

Research on the substrate materials of micro-strip gas chambers

作　　者：杨莹[1] 夏义本[1] 王林军[1] 张明龙[1] 汪琳[1] 苏青峰[1] 

机构地区：[1]上海大学材料科学与工程学院,上海201800

出　　处：《功能材料与器件学报》2004年第2期211-214,共4页Journal of Functional Materials and Devices

基　　金：National Natural Science Foundation of China (No. 60072033)

摘　　要：提出采用金刚石膜/硅复合材料作为MSGC基板的可行性。采用热丝辅助化学气相沉积(HFCVD)技术和相关退火工艺获得了金刚石膜/硅复合材料,并采用SEM、Raman光谱仪、微电流仪对复合材料的表面状况、结构、I-V和C-F特性进行了表征。结果表明,该复合材料经抛光后表面平整,退火后电阻率达2.9×10^(10)Ω·cm,电容值小且频率变化稳定,均满足MSGC对基板材料的要求,是一种应用前景极其广泛的MSGC衬底材料。The diamond film/silicon composite material for micro-strip gas chambers (MSGC) was obtained by HFCVD and related annealing technology. SEN images, Raman spectrum, and electrical properties were investigated. The results indicate that the roughness of the composite suhstrate is rather low, and the resistivity increases to 2. 9×10^(10)Ω·cm after annealing treatment. The capacitance of the composite material is velT small and almost has no variation with frequency. All these prove that diamond film/silicon composite material is a promising substrate tor MSGC.

关 键 词：微条气体室(MSGC) 探测器 基板 金刚石膜/硅复合材料 

分 类 号：TN304.18[电子电信—物理电子学]