电磁复合场三级几何像差方程的一种数值解法  

A Numerical Method of Solving the Third-Order Geometrical Aberration Equation in the Combined Fields

作　　者：杨立才[1] 张涛[1] 裘培勇 

机构地区：[1]山东工业大学自动化系,济南250014

出　　处：《电子学报》1993年第3期69-74,101,共7页Acta Electronica Sinica

摘　　要：本文提出了利用函数逼近的数值迭代方法精确求解电磁复合场中电子成像系统三级几何像差方程式的概念,避免了传统电子光学近似计算造成的附加误差,提高了像差计算的精度,为高精度电子光学设计提供了可信的依据。In this paper the concept for precisely solving the third-order geometrical aberration equation in combined fields, using the technology of functional approaching and numerical reiteration, is raised. This avoids the additional errors caused by approximate calculation in traditional electron- optics and makes the calculation of aberrations more precise. The conclusions given in this paper supply a dependable basis to the design work of electron-optics.

关 键 词：像差 电子束曝光 CAD 光电子学 

分 类 号：TN402[电子电信—微电子学与固体电子学]