钛酸钡系薄膜的制备方法、性质及应用  

Preparations,properties and applications of BaTiO_3-based thin film

作　　者：翟学良[1] 杨芙丽[1] 明常鑫[1] 高涛[2] 

机构地区：[1]河北师范大学实验中心,河北石家庄050016 [2]石家庄化肥厂

出　　处：《无机盐工业》2004年第4期5-8,共4页Inorganic Chemicals Industry

摘　　要：综述了制备钛酸钡系薄膜的各种方法,如:溶胶—凝胶法、有机金属化学气相沉积法、射频磁控溅射法、脉冲激光沉积法等,其中主要对溶胶—凝胶法和射频磁控溅射法的制备原理及工艺特点进行了讨论。介绍了钛酸钡薄膜的性质和掺杂后(主要是锶掺杂)对薄膜电性能的影响,对它们的应用现状进行了概括,并对钛酸钡系薄膜的发展趋势做了展望。The preparation methods of BaTiO_(3)-based thin film such as Sol-Gel method,metallorganic chemical vapor deposition(MOCVD)method,radio-frequency magnetron sputtering method and pulsed laser deposition method have been summarized.The preparation mechanism and process feature of Sol-Gel and radio-frequency magnetron sputtering methods are mainly discussed.The properties of BaTiO_(3) thin film and the influence of doping(Sr-doped) on the electric performance are also introduced.The current status of application and the development trend of BaTiO_3-based thin film are presented.

关 键 词：钛酸钡 薄膜 制备 

分 类 号：TQ132.35[化学工程—无机化工]