微系统研究的思考和单芯片RF-MEMS研究进展  

Research of MEMS and Development of One-chip RF-MEMS

作　　者：钟先信[1] 余文革[1] 李晓毅[1] 巫正中[1] 刘积学[1] 陈帅[1] 邵小良[1] 

机构地区：[1]重庆大学教育部光电技术及系统开放实验室,重庆400044

出　　处：《中国工程科学》2004年第7期21-25,共5页Strategic Study of CAE

基　　金：国家重点基础研究发展规划资助项目 (G19990 3 3 10 5 )

摘　　要：微光机电一体化系统简称微系统 ,是当今技术发展的前沿领域之一。微系统技术的发展将大大地促进许多产品或装置微型化、集成化和智能化 ,成倍地提高器件和系统的功能密度、信息密度与互连密度 ,大幅度地节能降耗 ,有广阔的应用领域和市场。文章阐述了微系统研究的意义以及微系统基础研究的重要性 ,概述了用于无线通信设备的MEMS器件的性能 ,指出了MEMS技术是最终实现单芯片机电一体化无线收发系统的根本途径之一 ,介绍了用于无线通信网络的单芯片机电一体化的微系统研究进展情况。Micro-electro-mechanical integration system,called microsystem for short is one of forefront technologies at present. The development of microsystem technologies will advance enormously micromation,integration and intelligentize of a lot of products and devices,double the function density, information density and interlinkage density of apparatus and system,save energy and reduce wasts greatly. It has quite wide application and market prospects. The significance of MEMS and its basic theory are expounded in this paper. Performances of MEMS devices used in wireless communication are summarized,and then a proposition that MEMS technology is one of the ultimate resolutions for one-chip wireless communication equipment is concluded. The evolvement status about one-chip mechanical electronic integration microsystem for wireless communication net is introduced.

关 键 词：微系统 集成 单芯片 无线通信系统 

分 类 号：TN4[电子电信—微电子学与固体电子学] TN92