微机械气体红外探测器的CFD模拟  

CFD Simulation of a Micro-Machined Pneumatic Infrared Detector

作　　者：吴峻苗[1] 邹德恕[1] 高国[1] 李兰[1] 刘铮[1] 杨道虹[1] 

机构地区：[1]北京工业大学北京市光电子技术实验室,100022

出　　处：《测控技术》2004年第5期14-15,35,共3页Measurement & Control Technology

基　　金：国家自然科学基金资助项目(69976004);北京自然科学基金资助项目(4982005)

摘　　要：概要地介绍了一种可工作于室温环境下的微型气体红外探测器,它基于气体吸收红外辐射后以无辐射去激励方式产生一系列热效应的物理基础,可获得包含红外辐射源信息的信号。为深入研究热效应所产生的微热信号对器件整体性能的控制和影响,建立了相应的流体力学(CFD)模型,通过数值分析方法,获得了气体物质微观行为随红外辐射源辐射特性的变化关系。A novel micro-machined pneumatic infrared sensor is addressed,which is classified as an uncooled infrared sensor. The sensor consists of a small cavity filled with a special gas,which shows a characteristic spectral sensitivity in the wavelength range of the infrared light.Infrared intensity is measured via the deflection of the membrane induced by thermal expansion of the special gas.In order to understanding the influences of micro-thermal signal,a CFD model is utilized for analyzing the performance,and by the finite element methodology,the micro-thermal phenomena in special gas is researched.

关 键 词：微机械 气动红外探测器 流体力学(CFD)模拟 

分 类 号：TP212.1[自动化与计算机技术—检测技术与自动化装置]