用于纳米级三维表面形貌及微小尺寸测量的原子力显微镜  

Atomic Force Microscope for Nanometer 3D Surface Shape and Micro Size Measuring

作　　者：高思田[1] 叶孝佑[1] 邵宏伟[1] 杜华[1] 金其海[1] 杨自本[1] 陈允昌[1] 

机构地区：[1]中国计量科学研究院,北京100013

出　　处：《制造技术与机床》2004年第8期34-39,共6页Manufacturing Technology & Machine Tool

摘　　要：SPM是在纳米尺度上进行测量的重要的测量仪器之一 ,随着SPM进入工业测量领域 ,SPM的校准、量值溯源和测量不确定度分析已经成为SPM能够作为计量仪器使用的关键所在。文章论述了一种计量型原子力显微镜的构成、校准以及在国际比对中的应用。The SPM goes forward one of important instruments measuring in the nano-scale. Following applied in the industrial measurement,the calibration,traceability and measuring uncertainty of SPM played an important role as one kind of metrological instrument. The paper described the structure,calibration and application in international comparison of one metrological atomic force microscope. Keyword:Atomic Force Microscope for Nanometer 3D Surface Shape and Micro Size Measuring$$$$GAO Sitian,YE Xiaoyou,SHAO Hongwei,DU Hua,JIN Qihai,YANG Ziben,CHEN Yunchang (National Institute of Metrology P.R.China,Beijing 100013,CHN) Abstract:The SPM goes forward one of important instruments measuring in the nano-scale. Following applied in the industrial measurement,the calibration,traceability and measuring uncertainty of SPM played an important role as one kind of metrological instrument. The paper described the structure,calibration and application in international comparison of one metrological atomic force microscope.

关 键 词：纳米技术 AFM 校准 表面形貌 微小尺寸测量 原子力显微镜 

分 类 号：TH741.8[机械工程—光学工程]