一种超小型1×2微机械光开关  

A Micromachining-based Miniature 1×2 MEMS Optical Switch

作　　者：鲍俊峰[1] 邹勇卓[1] 吴兴坤[1] 

机构地区：[1]浙江大学现代光学仪器国家重点实验室

出　　处：《光子学报》2004年第8期949-951,共3页Acta Photonica Sinica

摘　　要：设计制作了一种非硅基底的 1× 2微机械光开关 ,利用电磁驱动微反射镜运动实现输出端口切换 ,开关时间 <3ms ,封装尺寸缩小至 2 1mm× 16mm× 12 .6mm ,驱动电压 5VDC ,经 5× 10 6 次开关重复性测试 。A non-silicon based miniature-size 1×2 optical switch is reported. The switch comprises of a micro-mirror driven by electromagnetic actuator with a unique configuration in conjunction with a permanent magnet. The switch time was measured <3 ms at 5VDC application and packaged size reaches as small as 21 mm×16 mm×12.6mm. A 5×10 6 repetition test was conducted and the switch exhibits a stable operation through out the test.

关 键 词：光纤通讯 光开关 微机械 

分 类 号：TN929.11[电子电信—通信与信息系统]