高精度压印机压印轴的热误差分析  

Thermally Induced Error Analysis for the Imprint Spindle of High-PrecisionImprint Lithography Tools

作　　者：严乐[1] 卢秉恒[1] 丁玉成[1] 刘红忠[1] 

机构地区：[1]西安交通大学机械工程学院

出　　处：《西安交通大学学报》2004年第9期909-912,共4页Journal of Xi'an Jiaotong University

基　　金：国家重点基础研究发展计划资助项目 (2 0 0 3CB71 62 0 2 );国家高技术研究发展计划重点资助项目 (2 0 0 2AA42 0 0 50 );国家自然科学基金资助项目 (50 2 751 1 8)

摘　　要：在压印光刻工艺中,针对压印机由于温度变化而引起的热误差,通过建立压印机压印轴有限元分析模型,对其温度分布进行了仿真计算.采用高斯求积法优化了温度传感器的位置和数量,选取了1个热源点和2个高斯点作为测温关键点,建立了压印轴测温点的温度变化与压印轴轴向热误差之间的线性计算模型,该方法可以预先确定测温点的数量和位置,避免了传统的从多个测温点中通过实验选择最优传感器数量和位置的方法.研究结果表明,有限元计算结果与实验中温度测量值之间的误差小于7 7%,仿真结果能准确反映压印轴温度场的分布情况,所建立的压印轴热误差模型的计算精度可以达到93%,因此获得了较高的计算精度.Aimed at the tower imprint precision in imprint lithography process due to the thermally induced errors, a finite element model of the imprint spindle was constructed and the temperature field of the imprint spindle was acquired. Additionally, on the basis of Gaussian integration principle, one heat source point and two Gaussian integration points were chosen as the temperature measurement key points, and a linear model was proposed to describe and predict thermally induced error along the axial direction of the imprint spindle. This approach ensures to adopt a relatively fewer sensors to optimize the measurement conditions. The optimum, number and locations of temperature measurement are predetermined and the additional measurement is unnecessary. The simulation results show that the error between values from finite element model and the temperature measurement is less than 7.7%, and the pre-estimate accuracy of the thermally induced error model for the linear model reaches to 93%.

关 键 词：压印光刻 热误差 温度场 有限元 

分 类 号：TH161.4[机械工程—机械制造及自动化]