n-C_7H_(16)/CCl_4体系CVD-热解炭的形貌与形成机理  

Formation Mechanism of Spherical Pyrolytic Carbon During theCVD Process of an n-heptane/carbon Tetrachloride Mixture

作　　者：李国荣 黄永秋[2] 潘鼎[2] 

机构地区：[1]东华大学材料科学与工程学院,上海200051 [2]东华大学纤维材料改性国家重点实验室,上海200051

出　　处：《材料工程》2004年第7期51-54,63,共5页Journal of Materials Engineering

摘　　要：控制 CVD工艺条件得到球状热解炭 ,通过对沉积中间体的定性分析 ,证实了此过程中存在“缩聚机理”。运用热力学和晶体成核 -长大理论 。Spherical pyrolytic carbon was made by control of technical conditions. It is approved that condensation-polymerization mechanism exists in the CVD process by analyzing the intermediates qualitatively. The effects of temperature on morphology and deposition process of PyC are explained by using thermodynamics and the principle of the nuclei-growth of crystals.

关 键 词：热解炭 化学气相沉积 沉积机理 

分 类 号：TQ342.742[化学工程—化纤工业]