一种微型平面薄膜型酒敏器件的研制  

A C_2H_5OH Gas Sensor of Micro Thin Film Device

作　　者：邢建平[1] 蔡成森[1] 李娟[1] 裘南畹[2] 

机构地区：[1]山东大学信息科学与工程学院,济南250100 [2]山东大学物理与微电子学院,济南250100

出　　处：《传感技术学报》2004年第3期479-483,共5页Chinese Journal of Sensors and Actuators

摘　　要：粉末溅射有制靶简单、掺杂容易的特点 ,并有掺杂稳定的优点。利用反溅 ,发展了粉末溅射 ,制备了酒敏微型平面薄膜。对薄膜的相关特性进行了研究 ,给出了薄膜最佳掺杂范围、最佳灵敏度的膜厚以及响应时间与恢复时间随膜厚变化的规律 ,总结了最优参数。又测试了器件性能 ,通过实验对影响灵敏度测试的条件如测试电压和湿度影响灵敏度的规律进行了分析和讨论。结论认为 ,所研制的粉末溅射微型薄膜酒敏器件性能可靠、灵敏度高、稳定性好。The powder sputtered method has some promising properties such as target making and doping easy, and it has been developed by using anti-sputter. On these characters, the thin film of gas sensor has been made and studied. The relations and laws have been given out, such as that between the thin film rate and powder doped, the best doping range, the best sensitivity thin film depth, response time and recovery time changing with thin film thickness. From results and the experiment research, the reliability testing voltage value range and the affect law of the active sensitivity of humidity are given. Finally some related problems were discussed, that is, it has benefit of doped reliability, sensitivity, stability for the film gas sensor with anti-sputter method.

关 键 词：粉末溅射 薄膜 酒敏 器件 

分 类 号：TN305.94[电子电信—物理电子学]