SOI通道转换型多模干涉耦合器的研究(英文)  

Fabrication of a SOI Based Channel-shifted Multimode Interference Coupler

作　　者：王章涛[1] 樊中朝[1] 陈少武[1] 余金中[1] 

机构地区：[1]中国科学院半导体研究所,集成光电子国家重点联合实验室,北京100083

出　　处：《光子学报》2004年第9期1047-1049,共3页Acta Photonica Sinica

基　　金：NationalNaturalScienceFoundationofChina(No .6 9990 5 4 0 ) ,National 86 3Project(No .2 0 0 2AA312 0 6 0 )andStateKeyDevelopmentProgramforBasicResearchofChina(No.G2 0 0 0 0 36 6 )

摘　　要：设计和制作了基于SOI的通道转换型多模干涉耦合器。用二维BPM方法分析了耦合器的性能与多模波导宽度和长度的依赖关系 .制作出的耦合器能实现良好的通道转换 ,器件的功率转换比为 73,附加损耗为 2 .2dB .提高器件制作的精度将能进一步改善耦合器的性能 .A silicon-on-insulator based channel-shifted multimode interference coupler is designed and fabricated. A two dimensional beam propagation method is used to analyze the dependence of coupler′s performances on the width and length of the multimode waveguide. The device fabricated has a power shift ratio of 73 and an excess loss of about 2.2 dB. An enhancement of fabrication accuracies could further improve the coupler performances.

关 键 词：SOI 多模干涉 通道转换 

分 类 号：TN252[电子电信—物理电子学]