硬X射线梯度渐变多层膜设计  

Design of Hard x-ray Depth-graded Multilayer

作　　者：姚志华[1] 金春水[1] 曹健林[1] 

机构地区：[1]长春光学精密机械与物理研究所应用光学国家重点实验室,长春130033

出　　处：《长春理工大学学报（自然科学版）》2004年第3期80-83,共4页Journal of Changchun University of Science and Technology(Natural Science Edition)

基　　金：863计划项目 ( 863 80 4-7-7)

摘　　要：讨论了硬X射线梯度渐变多层膜的膜对材料的选择 ,介绍了分析方法、数值解析方法和分堆栈法三种用于膜系理论设计的方法 ,并且就这三种方法的优缺点进行了比较和分析。In the work, the design of hard x-ray depth-graded mu lt ilayer from how to choose coating materials was discussed. The three types of th eory design methods were introduced, they were analytical method, numerical meth od and multiblock method. The advantage and disadvantage of these three kinds of methods were compared and analyzed.

关 键 词：硬X射线梯度渐变多层膜 分析方法 数值解析方法 分堆栈法 

分 类 号：O43[机械工程—光学工程] O484[理学—光学]