PIII技术在制备c-BN硬化层中的应用  

Application of PIII Technology in Preparing of c-BN Hardened Layers

作　　者：王钧石[1] 柳襄怀[2] 王曦[2] 

机构地区：[1]西南交通大学材料科学与工程学院,四川成都610031 [2]中国科学院上海微系统与信息技术研究所离子束重点实验室,上海200050

出　　处：《稀有金属》2004年第4期690-694,共5页Chinese Journal of Rare Metals

基　　金：中国科学院上海微系统与信息技术研究所离子束重点实验室基金 ( 10 0 0 2 7) ;西南交通大学校基金 ( 2 0 0 0 12 )

摘　　要：采用一种新型的等离子体浸没式离子注入技术 (PIII)在渗硼后的 5 0Mn钢试样上制备出了厚度为 0 .15～ 0 .2mm的立方氮化硼 (c BN)表面硬化层。经X射线电子能谱 (XPS)和X射线衍射分析 (XRD) ,发现硬化层中的组织有立方氮化硼 (c BN)、六方氮化硼 (h BN)、B2 O3,FeB和Fe2 B。在表层 60nm的深度范围内 ,c BN的含量较高。采用球盘式无润滑滑动摩擦实验和维氏显微硬度实验分别对渗硼 +PIII复合处理以及单独渗硼的 5 0Mn钢试样的性能进行了对比实验。结果表明 :与单独渗硼的试样相比 ,经渗硼 +PIII复合处理的试样具有高得多的硬度 (高达HV0 .1N44GPa)A cubic boron nitride (c BN) surface hardened layer of 0.15～0.2 mm thick was prepared by a new plasma immersion ion implantation (PIII) technology on the specimens of 50 Mn steel boronised. Cubic boron nitride(c BN), hexagonal boron nitride (h BN), B 2O 3, FeB and Fe 2B were found in the hardened layers by X ray photoelectron spectroscopy(XPS) and X ray diffraction (XRD). There is much c BN in the region from the surface of the hardened layers to the depth of 60 nm. A sphere on disk sliding friction test in unlubricated condition and a micro Vickers hardness test for comparing the properties of the specimens treated doubly by boronising and PIII with the properties of the specimens boronised alone were performed. The results of the tests indicate that the speciment of 50Mn steel treated doubly by boronising and PIII have far higher (up to HV 0.1N 44GPa) hardness and wear resistance than the specimens of 50Mn steel boronised alone do.

关 键 词：立方氮化硼(c-BN) 渗硼 等离子体浸没式离子入注(PⅢ) 

分 类 号：TG156.8[金属学及工艺—热处理]