基于数学建模要求下先进的提拉法控制系统研制  

Modeling Requirements for Development of an Advanced Czochralski Control System

作　　者：Michael Gevelber  Danielle Wilson  Ning Duanmu  董淑梅 [2] 闫建文 [3] 李勇 [2] 

机构地区：[1]Process Control Laboratory, Manufacturing Engineering Department, Boston University, 15 St. Mary's St., Boston, MA 02215, USA [2]西安理工大学晶体生长设备研究所,710048 [3]西安理工大学水利水电学院,710048

出　　处：《电子工业专用设备》2004年第10期58-63,共6页Equipment for Electronic Products Manufacturing

摘　　要：提出了在开发一种先进的直拉法晶体生长控制系统中占据重要地位的设备及工艺特征的下位机模型;分析所采集到的实验数据,揭示出控制中的重要问题,由此开发了一种新的控制结构;该模型是建立在常规控制结构和提出新的控制结构性能对比的基础上。A low order model is presented that captures important equipment and process characteristics for development of anadvanced control system for Czochralski crystal growth. Analysis of experimental data sets reveals important control issues, leading to development of a new control structure. A model based performance comparison of the conventional and proposed control structure is presented. @ 2001 Elsevier Science B.V. All rights reserved.

关 键 词：计算机模拟 控制系统设计 生长模型 热传递 直拉法 半导体Si 

分 类 号：TN304.053[电子电信—物理电子学]