溶胶-凝胶多层高反射膜光学特性研究  

Theoretical Study on Optical Properties of Sol-Gel High-reflected Multi-layer Films

作　　者：袁英[1] 杨帆[2] 孙骐[2] 

机构地区：[1]安阳师范学院物理系,河南安阳455000 [2]同济大学波耳固体物理研究所,上海200092

出　　处：《安阳师范学院学报》2003年第5期18-21,共4页Journal of Anyang Normal University

摘　　要：利用EssentialMacleod膜系设计程序,对溶胶-凝胶法制备的多层光学高反膜的光学特性进行了理论上的研究。通过膜系设计程序计算得到光学特性曲线,分析了多层膜层数、膜层奇偶性和基底对薄膜光学性能的影响,得到性能最优的理论膜系结构。并设计了带有抗激光损伤匹配层的多层光学高反膜,研究了匹配层对高反膜光学特性的影响。以上研究结果将对溶胶-凝胶多层高反射膜的镀制起到重要的指导作用。The optical properties of highreflected multilayer films that were prepared by SolGel process were studied using Essential Macleod Optical Coating Design and Analysis Program. The optical curves were attained and the optical influences of the layernumber, the layerparity and the substrate were analyzed. The best theoretical filmstructure were attained. And the highreflected multilayer films with high laser damage matchlayers were designed. All of the results have very important meanings to guide the labpreparation of highreflected multilayer films by SolGel process.

关 键 词：溶胶-凝胶技术 ESSENTIAL Macleod 高反射膜 光学特性 

分 类 号：O485[理学—固体物理]