论直拉单晶炉技术平台的逻辑演进  

On the Logical Evolution of the Technical Platform in CZ-crystal Pullers

作　　者：许扬[1] 赵一谦[1] 李剑侠[1] 郑伟民[1] 田炜[1] 丁积军[1] 

机构地区：[1]西安理工大学晶体生长设备研究所,西安710048

出　　处：《人工晶体学报》2004年第3期448-454,共7页Journal of Synthetic Crystals

摘　　要：要求不断增大晶棒直径、不断提高晶体质量的晶圆市场 ,推动我国直拉单晶炉产品系列出现过三代更替 ,与此对应 ,产品赖以存在的技术平台也经历了三个阶段的演进。第四代产品研发需要在以往技术积累基础上 ,在炉室材料、炉体结构、焊接工艺、机械传动和电气控制、计算机智能控制、磁场发生装置和热场材料等方面进行新一轮技术创新。The crystal wafer market requires large dimension crystal ingots with high quality. This demand impulses the CZ-crystal pullers' development. Over the past years, three generations of our puller products have met the crystal production requirements in three different periods. In order to develop the fourth generation product, new technique innovation based on the previous technique accumulation is crucial, i. e. to select appropriate materials, to optimize logical furnace structure, to use reasonable welding methods, to develop trusty machine driver, to take modern electric control systems, to realize intelligent control by computer, to design and manufacture an available magnetic field device and to choose new heat field materials.

关 键 词：直拉单晶炉 生长工艺 热场材料 磁场 密封方式 晶间敏化 焊接方法 

分 类 号：O78[理学—晶体学] TQ054[化学工程]